Abstract: Provided is a resistor structure of a series resistor of an Electro-Static Discharge (ESD) device. A poly resistor is divided into N small parts, and each small part is connected to an upper-part metal layer through a respectively corresponding Contact and Via. The Contact and Via corresponding to each small part and the connected upper-part metal layer form an independent unit. A metal aluminum material is adopted for the Via and the upper-part metal layer. The metal aluminum material or an aluminum alloy material is adopted for the Contact. A heat capacity characteristic of metal aluminum is utilized, and an existing structure is ingeniously utilized, so that the resistor may be prevented from being damaged by heating caused by the same ESD current, and meanwhile, an overall size of a circuit where the ESD device is located is greatly reduced.

Abstract: Provided is a resistor structure of a series resistor of an Electro-Static Discharge (ESD) device. A poly resistor is divided into N small parts, and each small part is connected to an upper-part metal layer through a respectively corresponding Contact and Via. The Contact and Via corresponding to each small part and the connected upper-part metal layer form an independent unit. A metal aluminum material is adopted for the Via and the upper-part metal layer. The metal aluminum material or an aluminum alloy material is adopted for the Contact. A heat capacity characteristic of metal aluminum is utilized, and an existing structure is ingeniously utilized, so that the resistor may be prevented from being damaged by heating caused by the same ESD current, and meanwhile, an overall size of a circuit where the ESD device is located is greatly reduced.