Patents by Inventor Nikolai Schwerg
Nikolai Schwerg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11552657Abstract: The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P0. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.Type: GrantFiled: September 28, 2020Date of Patent: January 10, 2023Assignee: COMET AG PLASMA CONTROL TECHNOLOGIESInventors: Nikolai Schwerg, André Grede
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Publication number: 20220216838Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.Type: ApplicationFiled: May 22, 2020Publication date: July 7, 2022Inventors: Daniel Gruner, André Grede, Nikolai Schwerg, Anton Labanc, Manuel vor dem Brocke, Roland Schlierf
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Publication number: 20210105026Abstract: The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P0. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.Type: ApplicationFiled: September 28, 2020Publication date: April 8, 2021Inventors: Nikolai Schwerg, André Grede
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Patent number: 10818477Abstract: Methods and systems for impedance matching between loads and power generators are provided. The methods include: supplying a power generated by a power generator to a load by an impedance matching system that includes at least one reactance adjustable by at least one actuator and is configured to transform the load impedance at an input end of the load into a transformed load impedance at an input end of the impedance matching system, determining a power reflected at the load or at least one variable associated with the reflected power, determining, based on the reflected power or the at least one variable, that there is a mismatch, determining a trajectory in a complex load plane according to at least one specified criterion, and controlling the at least one actuator such that the transformed load impedance follows the trajectory to match an output impedance of the power generator.Type: GrantFiled: April 26, 2018Date of Patent: October 27, 2020Assignee: TRUMPF Huettinger GmbH + Co. KGInventors: Florian Maier, Nikolai Schwerg
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Patent number: 10551867Abstract: The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.Type: GrantFiled: December 29, 2017Date of Patent: February 4, 2020Assignee: TRUMPF Huettinger GmbH + Co. KGInventors: Andre Grede, Daniel Gruner, Armin Bannwarth, Christian Bock, Christoph Hofstetter, Alberto Pena Vidal, Nikolai Schwerg, Manuel vor dem Brocke, Markus Winterhalter
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Patent number: 10490876Abstract: This disclosure relates to directional couplers and methods of tuning directional couplers formed in a printed circuit board. The directional couplers include a main line for transmitting power and at least one secondary line having a coupling portion arranged parallel and at a distance from the main line in a coupling region. The directional coupler includes one or more additional coupling lines that have a coupling portion that runs parallel to and at a distance from the coupling section of the at least one secondary line. The one or more additional coupling lines have a connection arranged on the outer portion of the printed circuit board for selective grounding or connection to an external connection.Type: GrantFiled: December 22, 2017Date of Patent: November 26, 2019Assignee: TRUMPF Huettinger GmbH + Co. KGInventors: Andre Grede, Daniel Gruner, Alexander Alt, Nikolai Schwerg, Christian Wangler
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Publication number: 20180247795Abstract: Methods and systems for impedance matching between loads and power generators are provided. The methods include: supplying a power generated by a power generator to a load by an impedance matching system that includes at least one reactance adjustable by at least one actuator and is configured to transform the load impedance at an input end of the load into a transformed load impedance at an input end of the impedance matching system, determining a power reflected at the load or at least one variable associated with the reflected power, determining, based on the reflected power or the at least one variable, that there is a mismatch, determining a trajectory in a complex load plane according to at least one specified criterion, and controlling the at least one actuator such that the transformed load impedance follows the trajectory to match an output impedance of the power generator.Type: ApplicationFiled: April 26, 2018Publication date: August 30, 2018Inventors: Florian Maier, Nikolai Schwerg
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Publication number: 20180122625Abstract: Methods and devices for sampling a composite signal relating to a plasma process are provided. The composite signal has at least one plasma signal of interest and superimposed by at least one interfering signal. The methods include identifying the at least one interfering signal, digitalizing the composite signal by sampling the composite signal at a sampling frequency, and varying the sampling frequency during an operation of the plasma process according to at least one of a frequency of the at least one plasma signal of interest and a frequency of the at least one interfering signal.Type: ApplicationFiled: December 28, 2017Publication date: May 3, 2018Inventors: Andre Grede, Christian Bock, Nikolai Schwerg
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Publication number: 20180120889Abstract: The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.Type: ApplicationFiled: December 29, 2017Publication date: May 3, 2018Inventors: Andre Grede, Daniel Gruner, Armin Bannwarth, Christian Bock, Christoph Hofstetter, Alberto Pena Vidal, Nikolai Schwerg, Manuel vor dem Brocke, Markus Winterhalter
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Publication number: 20180123216Abstract: This disclosure relates to directional couplers and methods of tuning directional couplers formed in a printed circuit board. The directional couplers include a main line for transmitting power and at least one secondary line having a coupling portion arranged parallel and at a distance from the main line in a coupling region. The directional coupler includes one or more additional coupling lines that have a coupling portion that runs parallel to and at a distance from the coupling section of the at least one secondary line. The one or more additional coupling lines have a connection arranged on the outer portion of the printed circuit board for selective grounding or connection to an external connection.Type: ApplicationFiled: December 22, 2017Publication date: May 3, 2018Inventors: Andre Grede, Daniel Gruner, Alexander Alt, Nikolai Schwerg, Christian Wangler