Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a light source and a MEMS-based scanning element for steering at least a portion of the light provided by the light source in at least one dimension as an output light signal, as well as one or more optical elements for collimating and/or redirecting light within a sealed chamber defined by the elements of a housing. In some embodiments, the one or more optical elements include a reflective lens that collimates the light provided by the light source while simultaneously correcting phase-front error imparted by the scanning element while steering the output beam.

Abstract: A system for tracking eye location is disclosed. Systems in accordance with the present invention include a scanner for sweeping a first optical signal across the surface of an eye, a detector for detecting a second optical signal reflected from the eye, and a detection circuit for determining a maximum intensity in the second optical signal. In operation, the scanner sweeps the first optical signal over the surface of the eye while the detection circuitry determines a plurality of intensity maxima in the second optical signal. The time between the intensity maxima during the sweep is indicative of the location of the cornea within the eye surface.

Abstract: A system for tracking eye location is disclosed. Systems in accordance with the present invention include a scanner for sweeping a first optical signal across the surface of an eye, a detector for detecting a second optical signal reflected from the eye, and a detection circuit for determining a maximum intensity in the second optical signal. In operation, the scanner sweeps the first optical signal over the surface of the eye while the detection circuitry determines a plurality of intensity maxima in the second optical signal. The time between the intensity maxima during the sweep is indicative of the location of the cornea within the eye surface.

Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) operating at a resonant frequency onto a corneal surface; and 2) detecting the light reflected from the corneal surface.

Abstract: A system for tracking eye location is disclosed. Systems in accordance with the present invention include a scanner for sweeping a first optical signal across the surface of an eye, a detector for detecting a second optical signal reflected from the eye, and a detection circuit for determining a maximum intensity in the second optical signal. In operation, the scanner sweeps the first optical signal over the surface of the eye while the detection circuitry determines a plurality of intensity maxima in the second optical signal. The time between the intensity maxima during the sweep is indicative of the location of the cornea within the eye surface.

Abstract: A system for tracking eye location is disclosed. Systems in accordance with the present invention include a scanner for sweeping a first optical signal across the surface of an eye, a detector for detecting a second optical signal reflected from the eye, and a detection circuit for determining a maximum intensity in the second optical signal. In operation, the scanner sweeps the first optical signal over the surface of the eye while the detection circuitry determines a plurality of intensity maxima in the second optical signal. The time between the intensity maxima during the sweep is indicative of the location of the cornea within the eye surface.

Abstract: A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate.

Abstract: A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate.

Abstract: An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

Abstract: An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

Abstract: An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.

Abstract: An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.

Abstract: An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.

Abstract: A MEMS device including a plurality of actuator layers formed over a substrate and a bimorph actuator having a substantially serpentine pattern. The serpentine pattern is a staggered pattern having a plurality of static segments interlaced with a plurality of deformable segments. Each of the plurality of static segments has a static segment length and each of the plurality of deformable segments has a deformable segment length, wherein the deformable segment length is substantially different than the static segment length. At least a portion of each of the plurality of deformable segments and each of the plurality of static segments is defined from a common one of the plurality of actuator layers.

Abstract: A MEMS device including a plurality of actuator layers formed over a substrate and a bimorph actuator having a substantially serpentine pattern. The serpentine pattern is a staggered pattern having a plurality of static segments interlaced with a plurality of deformable segments. Each of the plurality of static segments has a static segment length and each of the plurality of deformable segments has a deformable segment length, wherein the deformable segment length is substantially different than the static segment length. At least a portion of each of the plurality of deformable segments and each of the plurality of static segments is defined from a common one of the plurality of actuator layers.

Abstract: A scratch drive actuator (SDA) device comprising a drive shoe and an actuator. The drive shoe has a first drive shoe position and a second drive shoe position and is configured to urge a shuttle from a first shuttle position to a second shuttle position. The actuator is coupled to the drive shoe and is configured to expand and contract in response to exposure to thermal energy, wherein the expansion and contraction of the actuator each urge the drive shoe towards a corresponding one of the first and second drive shoe positions.

Abstract: A system and method of adjusting the power off positioning of a microactuator is disclosed. The microactuator has a first power off position and comprises a bimorph component. The bimorph comprises at least two materials, wherein the materials have different thermal expansion characteristics. When heated, the bimorph component of the microactuator bends due to asymmetric thermal expansion of the materials. If one of said materials is forced beyond a yield point, then when cooled, the actuator assumes a second power off position. The microactuator maintains the second power off position due to stress in the bimorph, which is induced by forcing the material beyond its yield point.

Abstract: Linear bimorph actuators are cascaded together in serpentine array structures to achieve large angle rotary displacements. Bimorph units contain single material beams that remain straight when heated coupled with substantially parallel bilayer beams that deflect when heated, due to differential thermal expansion of the layers. For a bilayer beam, advantageous materials are gold on top of polysilicon. The angular deflection is amplified by cascading to achieve cumulative rotational displacements up to greater than 90 degrees. Successive beams can be connected electrically in series to provide a continuous current path for resistive joule heating. In various embodiments, the actuator is fully permanently anchored or releasably attached to a substrate, or at least a segment of the substrate is removed from beneath the actuator to prevent mechanical interference.