Abstract: A method for reducing aliasing effects in scanning beam microscopy, comprises generating a plurality of successive images of the same object, wherein each image is shifted in the vertical direction with respect to the preceding one by a sub-pixel distance and then averaging all the images together.

Abstract: A system for inspecting a display panel including a plurality of pixels, the system including a selective pixel actuator which causes only some of the plurality of pixels to be actuated, a sensor for acquiring an image of a pattern which is generated on the panel, and an image processor operative to identify nonuniformities in the intensities of pixels of the panel.

Abstract: A method for fast and reliable defect detection on semiconductor devices by comparing SEM images from a single perspective followed by a cross-check between at least two perspectives. An SEM equipped with at least two electron detectors each of which is capable of collecting electrons from different angular sectors. `Base` images of an area of the semiconductor wafer which is to be inspected are generated from both perspectives. For each perspective base image, a perspective `reference` image is generated, which is suitable for comparison with the base image. The reference image is registered with respect to the base image, for each perspective, the reference image is compared with the base image, and a comparison map of possible defect locations is produced, and, finally, a cross-check is carried out between the perspective comparison maps. The cross-check filters out events in the perspective comparison maps relating to variations other than defects such as pattern variations and noise.

Abstract: An optical inspection system for distinguishing between a laminate formed of a first component having a second component disposed on a first surface thereof, comprising a collection optics including a cylindrical concave elliptical reflecting surface and having a first focal line coplanar with a first surface of the laminate. A light source in fixed spatial relationship with the collection optics directs a first beam of light through an aperture in the elliptical reflecting surface towards the laminate so as to strike the surface along the first focal line and to produce a substantially conical fluorescent emission and so as to be reflected as a substantially conical reflection beam from respective first and second components of the laminate. A filter is disposed near a second focal line of the elliptical reflecting surface for separating the fluorescent emission from the reflection beam.