Abstract: A system and method of calibrating optical measuring equipment includes optically measuring discrete objects of a first known predictable pattern from a calibration apparatus, wherein the first known predictable pattern is a bit pattern. A recording surface optical reader is calibrated based on the optically measuring. Using the first known predictable pattern, contamination is filtered from the results of the optically measuring.

Abstract: The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.

Abstract: In an imprint lithography process, a carbon overcoat (COC) layer has nitrogen introduced into an upper surface region thereof before application of an adhesion layer to the COC/substrate combination. This results in the formation of a thin layer of nitrogenated carbon at the surface of the COC layer that promotes covalent bonding with the functional groups of the adhesion layer and, thus, significantly improves resist adhesion upon imprint template removal. Thus, an embodiment of an imprint lithography method comprises introducing nitrogen into an upper surface region of the COC layer, forming an adhesion layer on the nitrogenated COC layer, forming resist on the adhesion layer, contacting the resist with an imprint template having patterned features formed therein such that the resist fills the patterned features of the imprint template, and separating the imprint template from the resist such that a negative image of the patterned features is formed in the resist.

Abstract: A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

Abstract: A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

Abstract: The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.

Abstract: A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material; (b) forming a layer of a mask material on the layer of non-magnetic material; (c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material; (d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material; (e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and (f) removing the topographically patterned layer of mask material.

Abstract: A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium, comprising sequential steps of: (a) providing a permanent master comprising a body of a substantially rigid material having a surface with a topographical pattern formed therein comprising a patterned plurality of spaced-apart recesses with a plurality of non-recessed areas therebetween, the topographical pattern corresponding to a pattern to be formed in a recording medium; (b) forming a layer of a substantially rigid material over the surface of the permanent master with the topographical pattern formed therein; (c) separating the layer of a substantially rigid material from the master, the layer of a substantially rigid material having an imprinting surface with a topographical pattern formed therein replicating the topographical pattern of the permanent master; and (d) repeating steps (b) and (c) multiple times with the permanent master provided in step (a) to form a plurality of stampers/imprinters.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprising the sequential steps of providing a substrate/workpiece comprising a topographical pattern formed in a portion of a surface of the substrate/workpiece. The pattern defines a periphery. An alignment mark is formed in another portion of the surface of surrounding the periphery. An opaque protective film is formed overlying the entirety of the surface. A peripheral portion of the protective film is removed to expose the alignment mark. Selected portions of the substrate/workpiece are removed while the alignment mark is utilized for accurate alignment during the removal process. Remaining portions of the protective film are removed prior to use.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.

Abstract: A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material; (b) forming a layer of a mask material on the layer of non-magnetic material; (c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material; (d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material; (e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and (f) removing the topographically patterned layer of mask material.

Abstract: Defects of a hard disk drive servo pattern stamper are detected by comparing a scattered light beam pattern against the known servo pattern. A magnetic field is applied to stamper and the beam is linearly polarized. Variations in the physical offset of the beam, its scatter, are indicative of physical defects. Variations in the Kerr rotation of scattered beam are indicative of magnetic defects.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.

Abstract: A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of:

Abstract: A method of manufacturing a magnetic stamper/imprinter for use in patterning of magnetic recording media by means of a contact printing process, comprising sequential steps of: (a) providing a stamper/imprinter comprising a body of a magnetic material having an imprinting surface including a topographical pattern corresponding to a pattern to be formed in the surface of a magnetic or magneto-optical (MO) recording medium and comprising a patterned plurality of spaced-apart recesses with a plurality of non-recessed areas therebetween, said imprinting surface including a plurality of defects comprising surface blemishes and stains, magnetic particles, and non-magnetic particles; (b) initially removing the surface blemishes, stains, and magnetic particles; and (c) then removing or rendering the non-magnetic particles benign to the contact printing process.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.

Abstract: Defects of a hard disk drive servo pattern stamper are detected by comparing a scattered light beam pattern against the known servo pattern. A magnetic field is applied to stamper and the beam is linearly polarized. Variations in the physical offset of the beam, its scatter, are indicative of physical defects. Variations in the Kerr rotation of scattered beam are indicative of magnetic defects.