Abstract: A mask for exposure is supported at three positions on a holding surface of a mask chuck of an X-ray exposure apparatus by means of kinematic mounting. Magnetic units, each comprising an electromagnet, and magnetic rings are provided around supporting points at the three,positions on the mask chuck and on the mask frame, respectively. It is thereby possible to generate a tensile force to magnetically attract the mask frame in the direction of the normal of the holding surface of the mask chuck, and to attract and hold the mask on the mask chuck. Thus, the mask can be chucked on the X-ray exposure apparatus in substantially the same state as that of a mechanical clamp on an electron beam (EB) scanning apparatus while the mask is manufactured, without using a mechanical clamping mechanism.

Abstract: An X-stage is moved in an X direction (horizontal direction), and a Y-stage is moved in a Y direction (vertical direction) by linear motors. The gravitational force of the Y-stage is canceled out by a constant tension spring. Tensile force irregularity in the constant tension spring is measured in advance and stored in a tensile force irregularity compensation table. The tensile force irregularity is canceled out when a controller controls an auxiliary motor.

Abstract: A velocity sensor for detecting velocity even in a low velocity range has a velocity detecting element including a movable micromember, a deviation amount detecting device, a holding device and a velocity signal calculating device. The movable micromember is rotatably supported around a center of gravity for generating a frictional force or a dynamical pressure that is proportional to a velocity of a fluid. The deviation amount detecting device detects a deviation amount around the center of gravity of the movable micromember to generate an output voltage, which is proportional to the detected deviation amount. The holding device provides a holding force, which is proportional to the output voltage of the deviation amount detecting device, to the movable micromember and holds the movable micromember to a position around the center of gravity. The velocity signal calculating device calculates a velocity signal from the output of the deviation amount detecting device.