Patents by Inventor Nobutaka Fukushima

Nobutaka Fukushima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a semiconductor device comprising titanium
    Patent number: 5312774
    Abstract: A method for manufacturing a semiconductor device comprising forming a titanium or titanium compound film by a CVD method which uses a material gas containing an organic titanium compound of the formula (I) ##STR1## wherein R is a hydrogen atom, a lower alkyl group, a C.sub.8-13 condensed polycyclic hydrocarbonyl group or a silyl group which is substituted with a lower alkyl and/or an aryl, and a reducing gas.
    Type: Grant
    Filed: December 3, 1992
    Date of Patent: May 17, 1994
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Kazuyo Nakamura, Keiichiro Uda, Osamu Yamazaki, Hiromi Hattori, Nobutaka Fukushima, Shigeo Onishi