Abstract: A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.

Abstract: The condition of a technical installation is automatically monitored. A measured value of at least one component of the installation is sensed by at least one sensor device on the installation, and the at least one measured value is used, in a data processing arrangement specific to the installation, for determining a current operating state of the installation. By way of the data processing arrangement, including component-specific aging functions, a future chronological course of the operating condition is determined from the current operating condition, and a maintenance interval for the installation is adjusted on the basis of the future chronological course of the operating condition, in order to determine a next maintenance date of the installation. A corresponding arrangement and a computer program product for condition monitoring are also described.

Abstract: An optical element is disclosed. In an embodiment an optical element includes a substrate having a silicone surface, an antireflection layer overlying the silicone surface, wherein the antireflection layer comprises a first organic layer having a reflection-reducing nanostructure, the nanostructure having a depth of at least 30 nm, and a cover layer overlying the first organic layer, the cover layer having a thickness of no more than 40 nm.

Abstract: A method for producing a reflector element and a reflector element are disclosed. In an embodiment the method includes depositing a layer sequence on a substrate, wherein the layer sequence includes at least one mirror layer and at least one reactive multilayer system and igniting the reactive multilayer system in order to activate heat input in the layer sequence.

Abstract: A reflection-reducing layer system is disclosed. In an embodiment, the system includes a refractive index gradient layer including an inorganic material and an organic material in a spatially varying composition, wherein the refractive index gradient layer has a refractive index which decreases in a growth direction and an organic layer arranged above the refractive index gradient layer, the organic layer having a surface including a nanostructure.

Abstract: An optical element including a reflective coating is disclosed. In an embodiment the reflective coating includes an adhesion-promoting layer, an at least partially reflective silver layer disposed on the adhesion-promoting layer and a protective layer system disposed on the silver layer, wherein the protective layer system includes a plurality of dielectric layers, wherein the dielectric layers include at least one first layer and at least one second layer, wherein the first layer and the second layer have a different resistance to at least two different contamination substances, wherein the dielectric layers have a thickness of not more than 30 nm, and wherein a number of the dielectric layers amounts to at least five.

Abstract: A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.

Abstract: An optical element is disclosed. In an embodiment an optical element includes a substrate having a silicone surface, an antireflection layer overlying the silicone surface, wherein the antireflection layer comprises a first organic layer having a reflection-reducing nanostructure, the nanostructure having a depth of at least 30 nm, and a cover layer overlying the first organic layer, the cover layer having a thickness of no more than 40 nm.

Abstract: A method for producing an antireflection layer on a silicone surface is described. The method includes application of an organic layer, production of a nanostructure in the organic layer by a plasma etching process, and application of at least one cover layer onto the nanostructure. An optical element can be produced by the method.

Abstract: A reflection-reducing layer system is disclosed. In an embodiment, the system includes a refractive index gradient layer including an inorganic material and an organic material in a spatially varying composition, wherein the refractive index gradient layer has a refractive index which decreases in a growth direction and an organic layer arranged above the refractive index gradient layer, the organic layer having a surface including a nanostructure.

Abstract: A method for producing a reflection-reducing layer system on a substrate and a reflection-reducing layer system are disclosed. According to an embodiment the method includes depositing a refractive index gradient layer on the substrate by co-evaporation of an inorganic material and an organic material, wherein the refractive index gradient layer has a refractive index which decreases in a growth direction, depositing an organic layer above the refractive index gradient layer, and producing a nanostructure in the organic layer by a plasma etching process.

Abstract: A method for producing a reflector element and a reflector element are disclosed. In an embodiment the method includes depositing a layer sequence on a substrate, wherein the layer sequence includes at least one mirror layer and at least one reactive multilayer system and igniting the reactive multilayer system in order to activate heat input in the layer sequence.

Abstract: The condition of a technical installation is automatically monitored. A measured value of at least one component of the installation is sensed by at least one sensor device on the installation, and the at least one measured value is used, in a data processing arrangement specific to the installation, for determining a current operating state of the installation. By way of the data processing arrangement, including component-specific aging functions, a future chronological course of the operating condition is determined from the current operating condition, and a maintenance interval for the installation is adjusted on the basis of the future chronological course of the operating condition, in order to determine a next maintenance date of the installation. A corresponding arrangement and a computer program product for condition monitoring are also described.

Abstract: An optical element including a reflective coating is disclosed. In an embodiment the reflective coating includes an adhesion-promoting layer, an at least partially reflective silver layer disposed on the adhesion-promoting layer and a protective layer system disposed on the silver layer, wherein the protective layer system includes a plurality of dielectric layers, wherein the dielectric layers include at least one first layer and at least one second layer, wherein the first layer and the second layer have a different resistance to at least two different contamination substances, wherein the dielectric layers have a thickness of not more than 30 nm, and wherein a number of the dielectric layers amounts to at least five.

Abstract: A method for producing a reflection-reducing layer system on a substrate and a reflection-reducing layer system are disclosed. According to an embodiment the method includes depositing a refractive index gradient layer on the substrate by co-evaporation of an inorganic material and an organic material, wherein the refractive index gradient layer has a refractive index which decreases in a growth direction, depositing an organic layer above the refractive index gradient layer, and producing a nanostructure in the organic layer by a plasma etching process.

Abstract: A method for producing an antireflection layer on a silicone surface is described. The method includes application of an organic layer, production of a nanostructure in the organic layer by a plasma etching process, and application of at least one cover layer onto the nanostructure. An optical element can be produced by the method.

Abstract: A method for producing an antireflection coating on a substrate is specified. A first nanostructure in a first material is formed using by means of a first plasma etching process. The first material is the material of the substrate or the material of a layer made of a first organic material applied onto the substrate. A layer made of a second material is applied onto the first nanostructure, the second material is an organic material. A second nanostructure is formed in the layer made of the second material using a second plasma etching process. The second material has a higher etching rate than the first material when carrying out the second plasma etching process.

Abstract: A method for producing an antireflection coating on a substrate is specified. A first nanostructure in a first material is formed using by means of a first plasma etching process. The first material is the material of the substrate or the material of a layer made of a first organic material applied onto the substrate. A layer made of a second material is applied onto the first nanostructure, the second material is an organic material. A second nanostructure is formed in the layer made of the second material using a second plasma etching process. The second material has a higher etching rate than the first material when carrying out the second plasma etching process.

Abstract: A method is provided for operating an engine that includes, but is not limited to checking if a clutch pedal is depressed. If this is the case, the setpoint value for the rotational speed is predetermined to a target idle speed and a target torque is predetermined. Following this it is checked if the clutch pedal is in a position in which it is no longer depressed, and if the neutral gear sensor indicates that a gear is engaged. If this is the case, the setpoint value of the rotational speed of the engine and/or the torque reserve are increased. Otherwise, the setpoint value of the rotational speed of the engine and the torque are left.

Abstract: A reflection-reducing interference layer system is disclosed, which has at least three alternating layers having different refractive indices. At least one nanostructured layer comprising an organic material or an organic-inorganic hybrid material is applied to the alternating layers. With the interference layer system, it is possible to obtain very low reflection over a wide wavelength and incident angle range.