Patents by Inventor Norbert Marxer

Norbert Marxer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process and assembly for non-destructive surface inspections
    Patent number: 7477371
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: January 13, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Process and Assembly for Non-Destructive Surface Inspections
    Publication number: 20070103676
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Application
    Filed: August 15, 2006
    Publication date: May 10, 2007
    Applicant: KLA-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth Gross, Hubert Altendorfer, George Kren
  • Process and assembly for non-destructive surface inspections
    Patent number: 7102744
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: September 5, 2006
    Assignee: KLA-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Process and assembly for non-destructive surface inspections
    Publication number: 20040080741
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Application
    Filed: July 10, 2003
    Publication date: April 29, 2004
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Process and assembly for non-destructive surface inspections
    Patent number: 6606153
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: August 12, 2003
    Assignee: Kla-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Process and assembly for non-destructive surface inspections
    Publication number: 20020051130
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Application
    Filed: July 10, 2001
    Publication date: May 2, 2002
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
  • Process and assembly for non-destructive surface inspections
    Patent number: 6271916
    Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: August 7, 2001
    Assignee: Kla-Tencor Corporation
    Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren