Abstract: The present invention provides a heating system, a heating method and a program, which can readily control processing temperature. A temperature calculating computer 4 of the heating system includes a device DB 42. The device DB 42 stores therein a temperature correcting table indicative of a relationship between an accumulated film thickness of extraneous matter attached to the interior of each heating apparatus and a temperature correcting amount, with respect to each heating apparatus, for each temperature (processing temperature) in the heating apparatus. Thus, the temperature correcting amount can be specified based on the temperature correcting table, the processing temperature and the accumulated film thickness, so that an optimized value can be calculated from the specified temperature correcting amount.

Abstract: A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.

Abstract: A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.

Abstract: The present invention relates to a recommending system that recommends content so as to keep constant network traffic between a user terminal and a server. The recommending system includes a user terminal, a content server that transmits content prestored in a storage device to the user terminal, and a recommending server that transmits recommendation data, which are connected via a network. The recommending server includes a communications unit that transmits the recommendation data to the user terminal, the recommendation data containing an identifier of provided content and a time, at which the content server starts providing the content to the user terminal, in correspondence with the identifier of the provided content. The user terminal includes a download unit that transmits the content request containing the identifier of the provided content to the content server at the time in correspondence with the identifier of the provided content in the recommendation data.

Abstract: In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of semiconductor manufacturing apparatus is prepared. As monitoring parameters, for example, a cumulative film thickness for deposition processes that have previously been performed in deposition apparatus and an opening of the pressure control valve located in a vacuum exhaust path to control the internal pressure of a reaction vessel are selected. Values of monitoring parameters obtained when the semiconductor manufacturing apparatus was normally operating are plotted on the biaxial coordinate system. A boundary between a normal condition and an abnormality status is set around a plot group.

Abstract: A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.

Abstract: A server device 12 constituting a group management system includes one or more manufacturing apparatuses 11 for performing a preset process on a target substrate, and the server device 12 includes a measurement information storage unit 1201 for storing therein one or more measurement information; an instruction receiving unit 1205 for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit 1203 for acquiring, from the measurement information storage unit 1201, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit 1206 for composing output information by using the acquired measurement information; and an output unit 1207 for outputting the output information composed by the output information composing unit 1206.

Abstract: It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing un

Abstract: A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus identifiers and time information, and storing at least one set of abnormality information indicating an abnormality and one or more measurement information, and outputting one or more abnormality information; a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit, is received; and an output unit for outputting the one or more charts composed by the chart composing unit, so that abnormality analysis can be carried out easily an

Abstract: A life estimating method for a heater wire, which can estimate the life of the heater wire more appropriately than conventional one, by utilizing data obtained during a period (e.g., a temperature rising period), in which a sign of disconnection of the heater wire is likely to be seen, upon estimating the life in advance before the heater wire used in a heating apparatus is disconnected. This method comprises the steps of: detecting a maximum value of magnitude of electric power supplied to the heater wire during the temperature rising period provided for elevating the temperature up to a heating temperature, by supplying the electric power to the heater wire prior to providing a heating process to a wafer or wafers.

Abstract: The present invention provides a heating system, a heating method and a program, which can readily control processing temperature. A temperature calculating computer 4 of the heating system includes a device DB 42. The device DB 42 stores therein a temperature correcting table indicative of a relationship between an accumulated film thickness of extraneous matter attached to the interior of each heating apparatus and a temperature correcting amount, with respect to each heating apparatus, for each temperature (processing temperature) in the heating apparatus. Thus, the temperature correcting amount can be specified based on the temperature correcting table, the processing temperature and the accumulated film thickness, so that an optimized value can be calculated from the specified temperature correcting amount.

Abstract: In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of semiconductor manufacturing apparatus is prepared. As monitoring parameters, for example, a cumulative film thickness for deposition processes that have previously been performed in deposition apparatus and an opening of the pressure control valve located in a vacuum exhaust path to control the internal pressure of a reaction vessel are selected. Values of monitoring parameters obtained when the semiconductor manufacturing apparatus was normally operating are plotted on the biaxial coordinate system. A boundary between a normal condition and an abnormality status is set around a plot group.

Abstract: The present invention relates to a recommending system that recommends content so as to keep constant network traffic between a user terminal and a server. The recommending system includes a user terminal, a content server that transmits content prestored in a storage device to the user terminal, and a recommending server that transmits recommendation data, which are connected via a network. The recommending server includes a communications unit that transmits the recommendation data to the user terminal, the recommendation data containing an identifier of provided content and a time, at which the content server starts providing the content to the user terminal, in correspondence with the identifier of the provided content. The user terminal includes a download unit that transmits the content request containing the identifier of the provided content to the content server at the time in correspondence with the identifier of the provided content in the recommendation data.

Abstract: A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.

Abstract: A video distribution system includes plural receiving terminals, a video distribution apparatus, and a common ID issuing and managing apparatus. Each of the plural receiving terminals has a terminal ID, makes a distribution request for video data, and receives the video data distributed in response to the distribution request. The video distribution apparatus distributes video data to the receiving terminal according to the distribution request.

Abstract: A data distribution apparatus includes a data file configured to store video data and advertisement data to be provided to a receiving terminal of a Video on Demand service; a video distributing unit configured to distribute video data in accordance with a distribution request from the receiving terminal; a video presentation confirming unit configured to confirm a presentation state of the video data at the receiving terminal; an advertisement distribution determining unit configured to determine distribution of advertisement data to the receiving terminal when it is confirmed that the video data to be distributed by the video distributing unit is being called; and an advertisement distributing unit configured to distribute the advertisement data.

Abstract: The debug assisting apparatus comprises a task information recording device to record the execution information of task A, task B, and task C executed by the OS 1 in multitask processing, an object execution information recording device to record the information of the objects operated by the tasks, an information merging device both to chronologically merge the recorded object execution information and execution information of task A, task B, and task C and to store such information as the program operation history in a history storing device, and an output data generating device to generate the output data showing the execution progress of task A, task B, and task C and the operation of the objects in association according to the operation history table in the history storing device and output such data to the input/output device (monitor).

Abstract: A debugger which helps a user perform object-based debugging. A class information generation section (8) generates class information based on the source code. The execution section (12) executes the program. The object information generation section (13) generates object information based on class information and execution information. The user sets a breakpoint in a desired object via the breakpoint setting section (16). A breakpoint may be set at a desired location in the object. The break processing section (18) detects a breakpoint and breaks the execution of the program. The reservation section (21) reserves a debug operation with the identifier of an object. When there is an object that can be referenced by the reserved identifier, the reservation execution section (22) executes the operation reserved for the object.