Patents by Inventor Norihide Sagara

Norihide Sagara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium
    Patent number: 11571706
    Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: February 7, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Fumihiro Miyazaki, Kazuhito Miyazaki, Norihide Sagara, Wataru Yoshitomi, Koutarou Onoue
  • MONITORING SYSTEM
    Publication number: 20210143033
    Abstract: A monitoring system for a sealing apparatus, the sealing apparatus configured to seal a substrate treatment apparatus by a housing and fill a space sealed by the housing with a predetermined gas atmosphere, the monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller configured to output a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or output a notification signal based on the detection result.
    Type: Application
    Filed: October 30, 2020
    Publication date: May 13, 2021
    Inventors: Shota KANEKO, Shigemi OONO, Norihide SAGARA
  • DROPLET EJECTING APPARATUS, DROPLET EJECTING METHOD, AND COMPUTER STORAGE MEDIUM
    Publication number: 20180257099
    Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
    Type: Application
    Filed: February 27, 2018
    Publication date: September 13, 2018
    Inventors: Fumihiro Miyazaki, Kazuhito Miyazaki, Norihide Sagara, Wataru Yoshitomi, Koutarou Onoue