Abstract: A plasma processing apparatus includes a processing chamber in which a sample is subjected to plasma processing, a first radio frequency power supply that supplies radio frequency power for generating plasma, a sample stage on which the sample is mounted, and a second radio frequency power supply that supplies radio frequency power to the sample stage, the plasma processing apparatus further includes a DC power supply that applies a DC voltage, that is changed according to a periodically repeated waveform, to the sample stage, and the waveform of one cycle has a period in which amplitude changes by a predetermined amount or more during a predetermined time. Accordingly, charged particles on a wafer surface are removed, a trench shape with high verticality can be obtained, and damage to a film that is not to be etched inside a trench can be reduced.

Abstract: According to one embodiment, a high-strength stabilizer steel for vehicles having excellent corrosion resistance and low-temperature toughness, containing 0.07 to 0.20% C, more than 0.6% and 1.5% or less Si, 1 to 3% Mn, 0.1 to 1.0% Cr, 0.005 to 0.080% sAl, 0.005 to 0.060% Ti, 0.005 to 0.060% Nb, 0.070% or less Ti+Nb, 150 ppm or less N, 0.035% or less P, 0.035% or less S, 0.01 to 1.00% Cu, 0.01 to 1.00% Ni, the remainder being Fe, and unavoidable impurities, wherein a structure before molding a stabilizer is any one of a bainite, a martensite, and a mixed structure of bainite/martensite and an original austenitic crystal grain size number after a heat treatment of the stabilizer is Gh 9 or more.

Abstract: According to one embodiment, a high-strength stabilizer steel for vehicles having excellent corrosion resistance and low-temperature toughness, containing 0.07 to 0.20% C, more than 0.6% and 1.5% or less Si, 1 to 3% Mn, 0.1 to 1.0% Cr, 0.005 to 0.080% sAl, 0.005 to 0.060% Ti, 0.005 to 0.060% Nb, 0.070% or less Ti+Nb, 150 ppm or less N, 0.035% or less P, 0.035% or less S, 0.01 to 1.00% Cu, 0.01 to 1.00% Ni, the remainder being Fe, and unavoidable impurities, wherein a structure before molding a stabilizer is any one of a bainite, a martensite, and a mixed structure of bainite/martensite and an original austenitic crystal grain size number after a heat treatment of the stabilizer is Gh 9 or more.