Abstract: A system including: an ozone generating device including discharge electrodes forming a discharge space; a gas supplying device; a power source device that supplies power to the discharge electrodes; a temperature adjustment device that adjusts temperature of the discharge electrodes; a control unit that controls the ozone generating device; and a detection unit that detects an ozone generation parameter in the ozone generating device. The control unit increases temperature of the discharge electrodes up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device and the gas supplying device or the temperature adjustment device and the power source device, based on the output ozone generation parameter, to thereby switch operation from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes and the discharge space are cleaned up while continuing generation of ozone in the discharge space.

Abstract: An ozone generation system comprises an electricity charge unit price storing part which stores an electricity charge unit and a gas charge unit price storing part which stores a gas charge unit price, based on the electricity charge unit price, the gas charge unit price and necessary generation amount of ozone which is required for an ozonized gas, regarding an ozone concentration and a gas flow rate which are ozone generation amount basic parameters, values at which a running cost is a minimum are determined, a gas flow rate controller is controlled so as for a gas flow rate to be the determined gas flow rate and power of a power supply for an ozone generator is controlled so as for an ozone concentration to be the determined ozone concentration.

Abstract: A system including: an ozone generating device including discharge electrodes forming a discharge space; a gas supplying device; a power source device that supplies power to the discharge electrodes; a temperature adjustment device that adjusts temperature of the discharge electrodes; a control unit that controls the ozone generating device; and a detection unit that detects an ozone generation parameter in the ozone generating device. The control unit increases temperature of the discharge electrodes up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device and the gas supplying device or the temperature adjustment device and the power source device, based on the output ozone generation parameter, to thereby switch operation from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes and the discharge space are cleaned up while continuing generation of ozone in the discharge space.

Abstract: An ozone generation system comprises an electricity charge unit price storing part which stores an electricity charge unit and a gas charge unit price storing part which stores a gas charge unit price, based on the electricity charge unit price, the gas charge unit price and necessary generation amount of ozone which is required for an ozonized gas, regarding an ozone concentration and a gas flow rate which are ozone generation amount basic parameters, values at which a running cost is a minimum are determined, a gas flow rate controller is controlled so as for a gas flow rate to be the determined gas flow rate and power of a power supply for an ozone generator is controlled so as for an ozone concentration to be the determined ozone concentration.

Abstract: A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.

Abstract: A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.

Abstract: An ozone generator in which a discharge region may be enlarged without damaging ozone generating performance. In the ozonizer, an alternating current is applied between a first electrode and a second electrode, and a discharge is produced in a gap into which oxygen is injected. In the first electrode, an ozone gas passage for retrieving ozone gas generated in the discharge region is located between an electrode surface facing the discharge region and a side. The ozone gas passages are dispersed in the first electrode. The ozone gas passages collect ozone generated at discharge region locations inside the first electrode.

Abstract: The present invention provides an ozonizer in which a discharge region may be increased without damaging ozone generating performance. In the ozonizer, electrode module(s) 102 an alternating current is applied between a first electrode 7 and a second electrode 3, and a discharge is brought about in a gap of the discharge region which is injected with a gas containing at least oxygen gas. In the first electrode 7, an ozone gas passage (8) for taking out ozone gas generated by the discharge region is formed between an electrode surface facing the discharge region and a side portion. A plurality of the ozone gas passages are dispersed in the first electrode. The plurality of ozone gas passages (8) collect and draw out ozone gas generated at a plurality of the discharge region locations inside the first electrode.