Abstract: A heat treatment apparatus includes a heating unit provided around a processing container accommodating a substrate; a plurality of blowing units configured to blow a cooling medium into a space between the processing container and the heating unit; and a shutter configured to simultaneously opens/closes at least two of the plurality of blowing units and including a slit formed corresponding to each of the blowing units.

Abstract: A heat treatment apparatus includes a heating unit provided around a processing container accommodating a substrate; a plurality of blowing units configured to blow a cooling medium into a space between the processing container and the heating unit; and a shutter configured to simultaneously opens/closes at least two of the plurality of blowing units and including a slit formed corresponding to each of the blowing units.

Abstract: The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.

Abstract: The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.

Abstract: Disclosed is a substrate heat treatment apparatus. The apparatus includes: a conveyance storage unit which includes a first storage section and a second storage section each of which stores a plurality of conveyance containers, and a conveyance mechanism configured to convey the conveyance containers, each of the conveyance containers accommodating a plurality of wafers; and a heat treatment unit including a heat treatment furnace which accommodates a holder configured to hold the plurality of wafers in multiple stages, and performs the heat treatment on the wafers. A mounting stage of a transfer section is provided below the first storage section in the conveyance storage unit. On the mounting stage, the conveyance containers are mounted so that the wafers within the conveyance containers are transferred to the holder in the heat treatment unit.

Abstract: Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions.

Abstract: Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions.

Abstract: There is provided a three-dimensional image reconstructing apparatus for reconstructing a three-dimensional image of an object.

Abstract: It is an object of the present invention to acquire 3-dimensional image data that correctly express a structural configuration of the subject by processing the projected image data obtained by projecting the subject toward the plural angles . A shape computing unit 260 calculates shape data which represent a outline of the subject, using a plurality of 1st image data of the subject obtained by projecting the subject toward the plural angles. A distributing unit 220 generates gray-scale density-distributions by spreading and distributing densities shown in gray-scale image of the subject respectively within angles along which said gray-scale image was captured. A second integrating unit 240 generates 3-dimensional gray-scale data, which expresses the subject with the 3-dimensional image data, by integrating a plurality of said gray-scale density-distributions generated from a plurality of gray-scale image captured from a plurality of angles.

Abstract: A projection image data captured from a plurality of angles is processed, and a three-dimensional image data accurately indicating a three dimensional structure for an object is obtained. A shape computing unit 260 computes shape data indicating an outline of a subject using a plurality of first image data of the subject captured from a plurality of angles. A distributing unit 220 generates a gray-scale density-distribution by extending and distributing density indicated in a gray-scale image of the subject acquired by a projection image capturing apparatus to an angle at which the gray-scale image is captured. The second integrating unit 240 generates a three-dimensional gray-scale data indicating the subject with three-dimensional image data by integrating a plurality of gray-scale images acquired from a plurality of angles and a plurality of gray-scale density-distribution. The first integrating unit 280 integrates the three-dimensional gray-scale image and shape data.

Abstract: There is provided a three-dimensional image reconstructing apparatus for reconstructing a three-dimensional image of an object.

Abstract: There are provided an electron microscope capable of carrying out focusing and astigmatism correction without depending on characteristics of a sample, and a method for controlling its focus position.

Abstract: Verification of properness of a modeling theory of an uncrystallized substance or an image processing method is made easy. There includes: a first displaying unit 120 for rotationally displaying an simulated three-dimensionally shaded model image, which is a shaded image of the three-dimensional reconstruction image; and a second displaying unit 140 for displaying the three-dimensional image of the substance acquired by experimental structural analysis, which synchronously rotates with the simulated three-dimensionally shaded model image.

Abstract: There are provided an electron microscope capable of carrying out focusing and astigmatism correction without depending on characteristics of a sample, and a method for controlling its focus position.

Abstract: A projection image data captured from a plurality of angles is processed, and a three-dimensional image data accurately indicating a three dimensional structure for an object is obtained. A shape computing unit 260 computes shape data indicating an outline of a subject using a plurality of first image data of the subject captured from a plurality of angles. A distributing unit 220 generates a gray-scale density-distribution by extending and distributing density indicated in a gray-scale image of the subject acquired by a projection image capturing apparatus to an angle at which the gray-scale image is captured. The second integrating unit 240 generates a three-dimensional gray-scale data indicating the subject with three-dimensional image data by integrating a plurality of gray-scale images acquired from a plurality of angles and a plurality of gray-scale density-distribution. The first integrating unit 280 integrates the three-dimensional gray-scale image and shape data.

Abstract: Verification of properness of a modeling theory of an uncrystallized substance or an image processing method is made easy. There includes: a first displaying unit 120 for rotationally displaying an simulated three-dimensionally shaded model image, which is a shaded image of the three-dimensional reconstruction image; and a second displaying unit 140 for displaying the three-dimensional image of the substance acquired by experimental structural analysis, which synchronously rotates with the simulated three-dimensionally shaded model image.

Abstract: It is an object of the present invention to acquire 3-dimensional image data that correctly express a structural configuration of the subject by processing the projected image data obtained by projecting the subject toward the plural angles . A shape computing unit 260 calculates shape data which represent a outline of the subject, using a plurality of 1st image data of the subject obtained by projecting the subject toward the plural angles. A distributing unit 220 generates gray-scale density-distributions by spreading and distributing densities shown in gray-scale image of the subject respectively within angles along which said gray-scale image was captured. A second integrating unit 240 generates 3-dimensional gray-scale data, which expresses the subject with the 3-dimensional image data, by integrating a plurality of said gray-scale density-distributions generated from a plurality of gray-scale image captured from a plurality of angles.

Abstract: An electron microscope comprising an electron gun for generating an electron beam, an irradiation lens system for irradiating a specimen with the electron beam, means for obtaining an image signal of the specimen, a frame memory for storing the image signal, means for obtaining a total accumulation function, which indicates the sum total of accumulated values in a plurality of one-dimensional directions, and in which each of the accumulated values in the plurality of one-dimensional directions indicates accumulation with respect to a frequency of a function obtained by applying one-dimensional Fourier transform to a function obtained by projecting two-dimensional intensity distribution of said image signal in corresponding one-dimensional direction thereof, and means for obtaining a substantial extreme point of the total accumulation function.