Abstract: An apparatus for feeding semiconductor substrates (i.e., wafers) or the like along a path to a processing section such as a hot plate, and moving the same therefrom to the next process. The apparatus includes: a belt conveyor means preferably comprised for a pair of belts and having a horizontal top surface which can be driven along the feed path; means for raising and lowering the belt conveyor means to allow the wafers to be placed into position and taken out of position on the processing section; a processing plate associated with the processing section having a suction tube through which a vacuum is applied to a wafer on the processing plate, and also having grooves to receive the belts when the wafer is placed on the processing plate; and elevator means, which cooperate with the belt conveyor means, for raising the wafer to detach from the plate.