Abstract: An information processing device includes: a foldable one display; a memory which stores at least a program; and a processor. By executing the program stored in the memory, the processor performs display mode switching processing to switch among a first display mode to control display in such a manner that a screen area of the display is set as one display area, a second display mode to control display in such a manner that the screen area of the display is split into two display areas of a first display area and a second display area with the first display area set as a primary screen and the second display area set as a secondary screen, and a third display mode to control display in such a manner that the second display area is set as the primary screen and the first display area is set as the secondary screen.

Abstract: A malfunction signal indicating that a laser device is malfunctioning is output from a misfire detector when the oscillation of a laser beam is detected by a laser oscillation detector in an event that no laser oscillation command is detected by a laser oscillation command detector. Another malfunction signal indicating that the laser device is malfunctioning is output from the malfunction detector when no oscillation of a laser beam is detected by the laser oscillation detector at a prescribed time after a laser oscillation command has been detected by the laser oscillation command detector. The troubled part (thyratron or charging circuit) in the laser device is located based on the detection results of the malfunction detector.

Abstract: An object is to perform controlling operation always accurately to eliminate a spiking phenomenon generated in a laser device. In an output controller (6), excitation intensity data causing energies of continual pulses to be set to have a desired identical value is previously stored in association with the respective continual pulses. In an output monitor (5), the energies of the oscillated pulses are detected. And detected values of energies of pulses in a continual pulse oscillation already done are compared with a desired pulse energy value and previously-stored charging voltages associated with the respective pulses are corrected in the output controller (6) on the basis of the comparison result. When the present invention is applied to control of an output of a light source in an aligner, an accuracy of control of exposure light can be remarkabley improved.

Abstract: A laser device is capable reducing fluctuation of the beam width of the output laser beam due to abrasion of its discharge electrodes. A part of the contour shape of a section perpendicular to the longitudinal axis of the chamber of the laser device in at least one of the electrodes, which part confronts the other one of the electrodes, has a shape of a circular arc having a predetermined radius. The width of at least one of the two electrode may be substantially equal to the width of electric discharge taken place between the electrodes. Further, a conductor member may be disposed on each side of the electrode along its longitudinal axis to reduce electric field strength therearound.

Abstract: A laser device is capable reducing fluctuation of the beam width of the output laser beam due to abrasion of its discharge electrodes. A part of the contour shape of a section perpendicular to the longitudinal axis of the chamber of the laser device in at least one of the electrodes, which part confronts the other one of the electrodes, has a shape of a circular arc having a predetermined radius. The width of at least one of the two electrode may be substantially equal to the width of electric discharge taken place between the electrodes. Further, a conductor member may be disposed on each side of the electrode along its longitudinal axis to reduce electric field strength therearound.

Abstract: An apparatus used for elimination of the influence of spiking in an excimer laser device. The values of predetermined parameters which contribute to the spiking such as oscillation suspension time in a successive pulse oscillation are obtained. Discharge voltage for each of the successive laser beam pulses is changed on the basis of the obtained parameter values such that subsequent successive laser beam pulses have the same energy. The discharge voltage is stored according to time elapsed after the start of the successive pulse oscillation, and discharge voltage is controlled such that stored discharge voltage corresponds to the measured elapsed time. During the time when a stepper is not performing processing using the laser beam, the laser beam pulse is oscillated under predetermined conditions and the energy of the resulting pulses is detected.

Abstract: An apparatus for controlling an output from an excimer laser device wherein at least two etalons each having a large diameter are arranged between a rear mirror and a laser chamber for the excimer laser device is disclosed. With the apparatus, the operative range of laser light outputted from the excimer laser device can be narrowed by executing superposition control for a wavelength of laser light which transmits through each etalon, while maintaining the number of spatial lateral modes. The apparatus is preferably employable as a light source particularly for a unit for projecting and exposing figures in a reduced size. Superposition control with the use of a superposition control unit, excitation intensity control for laser gas with the use of an excitation intensity control unit and partial gas replacement control for laser gas with the use of a gas control unit are executed in a predetermined timing relationship, respectively.

Abstract: Specification of an etalon included in a multimode, narrow-band oscillation excimer laster used as a light source for light exposure in photolithography are set to satisfy a relation S.lambda.W.lambda.R.lambda. (u,v)d.lambda..gtoreq..alpha., where .alpha. is an optical transfer function necessary for light exposure of resist according to a reticle pattern, R.lambda.(u,v) is an optical transfer function of monochromatic light for an illuminating system and a reduced-projection lens, W.lambda. is a weight which is applied to a waveform of a power spectrum in an oscillation laser beam at a wavelength .lambda.. Further, an inclination angle .lambda. of the etalon in its normal direction with respect to an optical axis when the etalon is provided between the chamber and rear mirror is set to satisfy a relation .theta.>tan.sup.