Abstract: An object of the invention is to provide an optical film product that is configured such that the direction of an optical axis can be easily recognized and that markings do not interfere with a defect inspection and to provide a method for producing such an optical film product. The invention is directed to an optical film product, including: an optical film layer having an optical axis; a surface protection film that is laminated on the optical film layer to protect the surface of the optical film layer; and an optical axis information part that shows information about the optical axis and is interposed between the optical film layer and the surface protection film.

Abstract: In order to substantially reduce the time required for examination and to enable the structure of the microscope apparatus for examining a wafer to be made in a compact size, the apparatus comprises a wafer examination unit provided midway on the transportation course of the wafer transporting means for being able to move the wafer under examination independently of the direction of its transporation, and an objective disposed above the wafer examination unit for being able to move along the upper face of the wafer which is held at the position of examination and in a direction different from the direction of the transportation.

Abstract: An automatic focusing microscope projects infrared rays onto a specimen along optical paths oblique to the optical axis of an optical system. For the focusing operation, a degree of focusing in the optical system is detected according to the deviation of the reflected rays from the optical axis. A reduction optical system with a positive refractive is placed between an objective and its image plane, so that the displacement of the image plane by visible and infrared rays is reduced. In the reduction optical system, the post principal point is located between the objective and its image plane and nearer to the image plane. The focal distance is less than 1/2 the focal distance of the objective. A focusing degree-detecting means is made up of a position sensor for sensing the position of the image formed by the reflected rays.

Abstract: A microscope wherein, in order that the observing position may be variable over a wide range of a sample to be observed without requiring a large objective, the objective optical system is so formed as to be movable in parallel with the sample surface and the light path length between the objective optical system and eyepiece optical system is made variable by moving the objective optical system.

Abstract: A focus detecting device comprising a light source means capable of alternating producing a pair of infrared light bundles, a light path changing means leading the infrared lights emitted alternately from the light source means toward an objective so as to pass through the periphery of the pupil of the objective through different courses, a contracting optical system arranged between the objective or a tube lens and the image forming surface of the objective or tube lens and having a positive refractive power contracting the position deviations of the infrared light images formed in positions different with the objectives to be used, a light receiving element capable of detecting the position of the infrared light image reflected from the object and a signal processing means detecting the position deviation from the in-focus position of the objective or an imaging lens with the output signal from the light receiving element, in order to enable to obtain a high detecting precision and detecting sensitivity on

Abstract: An optical surface profile measuring device adapted to be able to simultaneously or substantially simultaneously measure a same part on the surface of an object to be measured with two different measuring ranges by combining a surface profile measuring device of a high resolving power using the critical angle method with a surface profile measuring device having a wide measuring range using the astigmatism method, in order to facilitate the setting of a detecting head within a measuring range while maintaining a high resolving power and to enable to measure automatically regardless of the state of the measured surface.