Abstract: Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1564 nm, provide trains of optical pulses. The 1064-nm pulses are frequency tripled to 355 nm and the 1564-nm pulses are frequency doubled to 782 nm. The 355-nm and 782-nm pulses are mixed to provide 244-nm pulses. The 244-nm pulses are mixed with residual 1064-nm pulses to provide 198-nm output pulses of the apparatus. The output pulses can be either digitally modulated or amplitude modulated by controlling the phase relationship between the 1064-nm and 1564-nm pulses.

Abstract: Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1547 nm, provide trains of optical pulses. The 1064-nm pulses are frequency-quadrupled to a wavelength of 266 nm. The 1547-nm pulses are first mixed with the 266-nm pulses to provide pulses having a wavelength of 227 nm. The 227-nm pulses are then mixed with residual 1547-nm pulses from the first mixing to provide 198-nm output pulses of the apparatus.

Abstract: A method for generating ultraviolet radiation includes sum-frequency mixing in one optically nonlinear crystal fundamental-wavelength radiation generated by a Pr:YLF gain-element with radiation having a second-harmonic wavelength of fundamental-wavelength radiation generated by a Pr:YLF gain-element. The second-harmonic wavelength is generated in another optically nonlinear crystal. The fundamental-wavelength radiation being mixed and the fundamental wavelength radiation from which the second-harmonic radiation is generated may have the same wavelength or different wavelengths.

Abstract: A frequency-tripled laser-resonator has three resonator-branches. The branches are optically connected with each other by one or more polarization-selective devices. Unpolarized fundamental radiation is generated by optically pumping a gain-element in one branch of the resonator. The polarization-selective device provides that radiation in the other branches is plane-polarized, with the polarization planes of radiation entering the branches perpendicular to each other. Two optically nonlinear crystals are located in one of the branches of the resonator in which the fundamental radiation is plane-polarized and arranged to generate third-harmonic radiation. Three-branch resonators including two gain-elements having a optical relay therebetween, and a three-branch ring-laser-resonator are also disclosed.

Abstract: A frequency-tripled laser-resonator has three resonator-branches. The branches are optically connected with each other by one or more polarization-selective devices. Unpolarized fundamental radiation is generated by optically pumping a gain-element in one branch of the resonator. The polarization-selective device provides that radiation in the other branches is plane-polarized, with the polarization planes of radiation entering the branches perpendicular to each other. Two optically nonlinear crystals are located in one of the branches of the resonator in which the fundamental radiation is plane-polarized and arranged to generate third-harmonic radiation. Three-branch resonators including two gain-elements having a optical relay therebetween, and a three-branch ring-laser-resonator are also disclosed.

Abstract: Silicon wafer dicing apparatus includes a master oscillator power amplifier (MOPA) arrangement wherein the master oscillator includes a continuous wave (CW) laser the output of which modulated by an external modulator to provide optical pulses to be amplified in the power amplifier. In one example of the apparatus the power amplifier includes at least one amplification stage including an optical fiber gain-medium.

Abstract: A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the polarization-rotated beams is separated into two plane-polarized portions. One of the portions of one polarization-rotated beam is combined with one of the portions of the other polarization-rotated beam to provide an attenuated output-beam.

Abstract: An intracavity frequency-doubled includes a laser resonator including at least one gain element and two optically nonlinear crystals. The two optically nonlinear crystals independently double the frequency of fundamental radiation in the resonator. In one example the crystals are arranged to generate two frequency-doubled beams that are orthogonally plane-polarized with respect to each other. The beams can be combined by a polarization-selective combiner to form a common output.

Abstract: Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 2114 nm, provide trains of optical pulses. The 1064-nm pulses are frequency-quintupled to a wavelength of 213 nm. The 2114-nm pulses are mixed with the 213-nm pulses to provide pulses having a wavelength of 193 nm. Each MOPA includes a fiber-laser and a bulk amplifier.

Abstract: Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1547 nm, provide trains of optical pulses. The 1064-nm pulses are frequency-quadrupled to a wavelength of 266 nm. The 1547-nm pulses are first mixed with the 266-nm pulses to provide pulses having a wavelength of 227 nm. The 227-nm pulses are then mixed with residual 1547-nm pulses from the first mixing to provide 198-nm output pulses of the apparatus.

Abstract: A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the polarization-rotated beams is separated into two plane-polarized portions. One of the portions of one polarization-rotated beam is combined with one of the portions of the other polarization-rotated beam to provide an attenuated output-beam.

Abstract: A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the polarization-rotated beams is separated into two plane-polarized portions. One of the portions of one polarization-rotated beam is combined with one of the portions of the other polarization-rotated beam to provide an attenuated output-beam.

Abstract: A method for attenuating an unpolarized laser beam includes separating the laser beam into two plane-polarized beams. The plane-polarized beams are polarization rotated. Each of the polarization-rotated beams is separated into two plane-polarized portions. One of the portions of one polarization-rotated beam is combined with one of the portions of the other polarization-rotated beam to provide an attenuated output-beam.

Abstract: Laser apparatus including two different, pulsed MOPAs, one having a fundamental wavelength of 1064 nm and the other having a fundamental wavelength of 1564 nm, provide trains of optical pulses. The 1064-nm pulses are frequency tripled to 355 nm and the 1564-nm pulses are frequency doubled to 782 nm. The 355-nm and 782-nm pulses are mixed to provide 244-nm pulses. The 244-nm pulses are mixed with residual 1064-nm pulses to provide 198-nm output pulses of the apparatus. The output pulses can be either digitally modulated or amplitude modulated by controlling the phase relationship between the 1064-nm and 1564-nm pulses.

Abstract: A combined radiation pulse of a predetermined energy is provided by temporally and spatially overlapping four pulses from four extra-cavity, frequency-tripled lasers. Frequency tripling is effected in each laser by a second-harmonic generating crystal followed by a third-harmonic generating crystal. One of the lasers includes a Pockels cell preceding the second-harmonic generating crystal. The third harmonic pulse from this laser is the fourth and last delivered in the sequence. The total available energy in three of the pulses is less than the predetermined energy. The cumulative integrated energy of the pulses is determined while the pulses are being delivered. When the energy is determined to have reached the predetermined value, the Pockels cell is activated to rotate the polarization plane of fundamental radiation entering the second-harmonic generating crystal, thereby terminating generation of the fourth pulse and delivering the combined radiation pulse at the predetermined energy.

Abstract: A diode end-pumped solid state laser is provided which produces improved power output, long term stability and improved conversion efficiency from the pumping power, high as well as low power operation while maintaining certain desirable common characteristics such as TEM00 operation, circular outputs, readily aligned systems and compatibility with long lifetime for all components. The invention intracavity conversion to second, third and higher harmonics in several different spectral regimes. The invention also addresses the aspects of design flexibility, seeking in certain embodiments to provide a single platform for providing several harmonic beams.

Abstract: A method and system are described aimed at substantially increasing the lifetime of sensitive optical elements subjected to high power laser radiation. The lifetime enhancement is accomplished by spatially distributing the laser beam spots both globally and locally according to algorithms that are custom tailored to the subject element as well as the system and application needs. The methods of the invention are particularly well-suited to non-linear crystals used to convert radiation from high repetition rate, diode-pumped laser systems into the UV spectral range, where lifetime requirements are particularly challenging. The methods of the invention further enable effective utilization of available experimental data characterizing the element's performance in combination with a stored library of preferred spot scanning patterns that may be executed on the surface of the element according to the selected algorithm.

Abstract: A diode end-pumped solid state laser is provided which produces improved power output, long term stability and improved conversion efficiency from the pumping power, high as well as low power operation while maintaining certain desirable common characteristics such as TEM00 operation, circular outputs, readily aligned systems and compatibility with long lifetime for all components. The invention intracavity conversion to second, third and higher harmonics in several different spectral regimes. The invention also addresses the aspects of design flexibility, seeking in certain embodiments to provide a single platform for providing several harmonic beams.

Abstract: An edge-pumped solid state thin slab laser apparatus is disclosed that is power scalable to well over 150 W for either multimode or near single transverse mode operation. A slab thickness is selected that is small enough to minimize thermal effects for a straight through beam yet large enough to allow efficient direct coupling of pump light from high power diode array stacks while also keeping the gain to within manageable levels for pulsed operation. Cooling of the slab is provided conductively, preferably by contact with metal blocks of high thermal conductivity. The edge-pumped solid state thin slab laser provides a near-one dimensional temperature gradient and heat flow direction that is perpendicular to the laser signal plane of propagation. The width of the slab is selected so as to maximize pump absorption length for a given laser material and both one and two-sided pumping schemes can be accommodated by the basic slab laser platform, depending on power, mode and beam quality requirements.

Abstract: A solid state laser in which a slab of lasing material is held within an optical resonator is disclosed. The length of the slab in parallel to the optical axis of the resonator is between 5 and 1,000 mm, the width and thickness of the slab are 1-50 mm and 0.01-2 mm, respectively. The slab is designed in a way that causes the pump light to be confined when side- or end pumped by diode lasers. This is accomplished by either polishing the two largest area faces (referred to as upper and lower sides) of the slab and coating them with a material (dielectric or metallic) that is highly reflective at the emission wavelength, or by sandwiching the slab between dielectric materials that comprise a lower refractive index compared to the index of the slab. In alternative embodiments, the thin dimension of the slab may be selected so as to either guide the signal light or to allow free space propagation.