Patents by Inventor Ole Fluegge

Ole Fluegge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11740562
    Abstract: A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: August 29, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dieter Bader, Alexander Ostendorf, Ole Fluegge
  • Publication number: 20220019150
    Abstract: A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.
    Type: Application
    Filed: September 30, 2021
    Publication date: January 20, 2022
    Inventors: Dieter Bader, Alexander Ostendorf, Ole Fluegge
  • Patent number: 8891172
    Abstract: The disclosure relates to an optical element configure to at least partial spatially resolve correction of a wavefront aberration of an optical system (e.g., a projection exposure apparatus for microlithography) to which optical radiation can be applied, as well as related systems and methods.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: November 18, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner
  • Patent number: 8508854
    Abstract: The disclosure relates to an optical element configure to at least partial spatially resolve correction of a wavefront aberration of an optical system (e.g., a projection exposure apparatus for microlithography) to which optical radiation can be applied, as well as related systems and methods.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: August 13, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner
  • Patent number: 8325322
    Abstract: The disclosure relates to an optical correction device with thermal actuators for influencing the temperature distribution in the optical correction device. The optical correction device is constructed from at least two partial elements which differ with regard to their ability to transport heat. Furthermore, the disclosure relates to methods for influencing the temperature distribution in an optical element.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: December 4, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner, Aksel Goehnermeier, Dirk Hellweg
  • Publication number: 20110080569
    Abstract: The disclosure relates to an optical element configure to at least partial spatially resolve correction of a wavefront aberration of an optical system (e.g., a projection exposure apparatus for microlithography) to which optical radiation can be applied, as well as related systems and methods.
    Type: Application
    Filed: December 13, 2010
    Publication date: April 7, 2011
    Applicant: Carl Zeiss SMT GmbH
    Inventors: Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner
  • Publication number: 20100201958
    Abstract: The disclosure relates to an optical correction device with thermal actuators for influencing the temperature distribution in the optical correction device. The optical correction device is constructed from at least two partial elements which differ with regard to their ability to transport heat. Furthermore, the disclosure relates to methods for influencing the temperature distribution in an optical element.
    Type: Application
    Filed: February 4, 2010
    Publication date: August 12, 2010
    Applicant: Carl Zeiss SMT AG
    Inventors: Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner, Aksel Goehnermeier, Dirk Hellweg
  • Patent number: 7768721
    Abstract: In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: August 3, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf
  • Publication number: 20090257032
    Abstract: The disclosure relates to an optical element configure to at least partial spatially resolve correction of a wavefront aberration of an optical system (e.g., a projection exposure apparatus for microlithography) to which optical radiation can be applied, as well as related systems and methods.
    Type: Application
    Filed: March 11, 2009
    Publication date: October 15, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge, Arif Kazi, Alexander Sauerhoefer, Gerhard Focht, Jochen Weber, Toralf Gruner
  • Publication number: 20080316621
    Abstract: In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
    Type: Application
    Filed: June 20, 2008
    Publication date: December 25, 2008
    Inventors: Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf
  • Publication number: 20060044509
    Abstract: An apparatus and a method are used for adapting a position of at least one spectacle lens of a spectacle relative to the position of a pupil of an eye of a person, the eye being associated to the spectacle lens. The apparatus comprises an illuminating device for an eye area of the person wearing a spectacle frame that is not yet fitted with lenses. Further, at least one camera for generating an image of the eye area is provided. The position of the pupil within the image is marked. The illuminating device has at least one light source operating within a wavelength range the light of which being reflected by the retina of the eye at a high ratio of reflection. The camera in its sensitivity is optimized to the wavelength of the light emitted by the light source.
    Type: Application
    Filed: July 22, 2005
    Publication date: March 2, 2006
    Inventors: Ole Fluegge, Matthias Kubitza