Patents by Inventor Oleg Kishkovich
Oleg Kishkovich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20080009099Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.Type: ApplicationFiled: May 19, 2006Publication date: January 10, 2008Inventors: Oleg Kishkovich, Anatoly Grayfer, William Goodwin, Devon Kinkead
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Publication number: 20060266011Abstract: The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.Type: ApplicationFiled: April 3, 2006Publication date: November 30, 2006Inventors: David Halbmaier, Anthony Simpson, William Goodwin, Oleg Kishkovich, Thomas Kielbaso, Frank Manganiello
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Publication number: 20060169139Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: ApplicationFiled: February 28, 2006Publication date: August 3, 2006Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede
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Patent number: 7022164Abstract: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.Type: GrantFiled: August 25, 2003Date of Patent: April 4, 2006Assignee: Mykrolis CorporationInventors: Oleg Kishkovich, Robert W. Rezuke, Devon Kinkead
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Publication number: 20050106737Abstract: A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system in constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteristic of the multiple amines present, the detection system comprising at least two channels through which a gas to be examined passes, an amines remover located in one of the channels, at least one thermal/catalytic converter which discharges NO for each channel, and at least one chemiluminescent NO detector, whereby the total amine concentration is determined from the difference between the detected signals for the channels.Type: ApplicationFiled: September 17, 2004Publication date: May 19, 2005Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Devon Kinkead
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Publication number: 20050081715Abstract: The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.Type: ApplicationFiled: July 9, 2004Publication date: April 21, 2005Applicant: Extraction Systems, Inc.Inventors: William Goodwin, Oleg Kishkovich, Anatoly Grayfer
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Publication number: 20050051030Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: ApplicationFiled: May 21, 2004Publication date: March 10, 2005Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede
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Publication number: 20040154470Abstract: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.Type: ApplicationFiled: August 25, 2003Publication date: August 12, 2004Applicant: Extraction Systems, IncInventors: Oleg Kishkovich, Robert W. Rezuke, Devon Kinkead
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Patent number: 6610128Abstract: A clean, high efficieny, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.Type: GrantFiled: June 24, 2002Date of Patent: August 26, 2003Assignee: Extraction Systems, Inc.Inventor: Oleg Kishkovich
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Publication number: 20020166450Abstract: A clean, high efficieny, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.Type: ApplicationFiled: June 24, 2002Publication date: November 14, 2002Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Robert W. Rezuke, Devon Kinkead
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Patent number: 6447584Abstract: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.Type: GrantFiled: August 20, 1999Date of Patent: September 10, 2002Assignee: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Robert W. Rezuke, Devon Kinkhead