Patents by Inventor Oleg Sidorov

Oleg Sidorov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Line-based endpoint detection
    Patent number: 11355313
    Abstract: Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: June 7, 2022
    Assignee: FEI Company
    Inventors: Brian Routh, Jr., Brad Larson, Aditee Shrotre, Oleg Sidorov
  • LINE-BASED ENDPOINT DETECTION
    Publication number: 20210407765
    Abstract: Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.
    Type: Application
    Filed: June 30, 2020
    Publication date: December 30, 2021
    Applicant: FEI Company
    Inventors: Brian Routh, JR., Brad Larson, Aditee Shrotre, Oleg Sidorov
  • Method and System of Creating a Symmetrical FIB Deposition
    Publication number: 20150369710
    Abstract: A system is provided to produce symmetric depositions using a charged-particle beam deposition with an angled beam. In the past, the use of an FIB with non-orthogonal incidence angles produced depositions that grew toward the FIB beam path making it difficult to produce uniformity of the deposit. With the current invention, a symmetrical deposition is made even with the use of a non-orthogonal FIB.
    Type: Application
    Filed: October 27, 2014
    Publication date: December 24, 2015
    Applicant: FEI Company
    Inventors: Scott Edward Fuller, Oleg Sidorov