Patents by Inventor Oleg V. Serebryanov

Oleg V. Serebryanov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High efficiency high accuracy heater driver
    Patent number: 8548312
    Abstract: A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: October 1, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Alexander Goldin, Oleg V. Serebryanov
  • Lamp failure detector
    Patent number: 8106591
    Abstract: An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: January 31, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Oleg V. Serebryanov, Alexander Goldin, Joseph Michael Ranish
  • High Efficiency High Accuracy Heater Driver
    Publication number: 20110206358
    Abstract: A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
    Type: Application
    Filed: February 19, 2010
    Publication date: August 25, 2011
    Applicant: Applied Materials, Inc.
    Inventors: Alexander Goldin, Oleg V. Serebryanov
  • LAMP FAILURE DETECTOR
    Publication number: 20110133742
    Abstract: An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
    Type: Application
    Filed: February 10, 2011
    Publication date: June 9, 2011
    Inventors: OLEG V. Serebryanov, Alexander Goldin, Joseph Michael Ranish
  • Lamp failure detector
    Patent number: 7923933
    Abstract: An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: April 12, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Oleg V. Serebryanov, Alexander Goldin, Joseph Michael Ranish
  • Lamp Failure Detector
    Publication number: 20080164822
    Abstract: An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
    Type: Application
    Filed: January 4, 2007
    Publication date: July 10, 2008
    Inventors: Oleg V. Serebryanov, Alexander Goldin, Joseph Michael Ranish