Abstract: A system and a method for measuring of parameter values of semiconductor objects within wafers with increased throughput include using a modified machine learning algorithm to extract measurement results from instances of semiconductor objects. A training method for training the modified machine learning algorithm includes reducing a user interaction. The method can be more flexible and robust and can involve less user interaction than conventional methods. The system and method can be used for quantitative metrology of integrated circuits within semiconductor wafers.

Abstract: The presented invention relates to a method for reading data from a data page from an optical data storage medium, e.g. a holographic storage medium and to an apparatus for performing this method. At least one missing or wrong positioned sync mark on a read data page is identified and its corrected position is estimated. The estimated corrected sync mark position is used for further processing.

Abstract: The present invention relates to a method for calibrating a holographic storage system, and to an apparatus for reading from and/or writing to holographic storage media and a holographic storage medium suitable for such method. According to the invention, the method has the steps of: sending a set of test data pages through at least part of the holographic storage system; receiving a set of transmitted test data pages with a detector; comparing the set of transmitted test data pages with the set of sent test data pages; and correcting parameter variations of the holographic storage system based on the results of the comparing step.

Abstract: The present invention relates to a method for recording data pages in a holographic recording medium, and more specifically to a method for compensating for sensitivity variations of the holographic material of the holographic recording medium. According to the invention, a method for recording data pages on a holographic recording medium has the steps of: modulating a light beam with a spatial light modulator to generate a data page with data to be recorded, and applying a compensation profile to the data pages during recording for reducing contrast variations in the reconstructed data pages, wherein the compensation profile is determined from the irradiation history at the recording position and the sensitivity curve of the material of the holographic recording medium.

Abstract: The presented invention relates to a method for reading data from a data page from an optical data storage medium, e.g. a holographic storage medium and to an apparatus for performing this method. At least one missing or wrong positioned sync mark on a read data page is identified and its corrected position is estimated. The estimated corrected sync mark position is used for further processing.

Abstract: A data page for optical data storage for an optical storage system, i.e. a holographic storage system, is presented. The data page includes one or more areas, which are less sensitive against a movement of the data page in a movement direction of the storage medium. A holographic storage medium comprising such data pages is presented. An apparatus for reading from and/or writing to an optical medium comprising such data pages, and to a method for reading and/or writing such data pages is presented.

Abstract: Method for calibrating a holographic storage system The present invention relates to a method for calibrating a holographic storage system, and to an apparatus for reading from and/or writing to holographic storage media and a holographic storage medium suitable for such method. According to the invention, the method has the steps of: sending a set of test data pages through at least part of the holographic storage system; receiving a set of transmitted test data pages with a detector; comparing the set of transmitted test data pages with the set of sent test data pages; and correcting parameter variations of the holographic storage system based on the results of the comparing step.

Abstract: Intensity profile correction for data pages for holographic storage The present invention relates to a method for recording data pages in a holographic recording medium, and more specifically to a method for compensating for sensitivity variations of the holographic material of the holographic recording medium. According to the invention, a method for recording data pages on a holographic recording medium has the steps of: modulating a light beam with a spatial light modulator to generate a data page with data to be recorded, and applying a compensation profile to the data pages during recording for reducing contrast variations in the reconstructed data pages, wherein the compensation profile is determined from the irradiation history at the recording position and the sensitivity curve of the material of the holographic recording medium.