Patents by Inventor Onofio L. Timperio

Onofio L. Timperio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etcher with heated ash chamber base
    Publication number: 20030183252
    Abstract: A semiconductor manufacturing apparatus is described. That apparatus includes an ash chamber that has an ash chamber base, and a heating unit that is coupled to the ash chamber base. The heating unit applies heat to the ash chamber base to reduce deposition of residues onto ash chamber base surfaces, which could cause surface particle defects in a semiconductor device.
    Type: Application
    Filed: March 26, 2003
    Publication date: October 2, 2003
    Inventors: Onofio L. Timperio, Stephen J. Luca
  • Method of reducing residue deposition onto ash chamber base surfaces
    Patent number: 6564811
    Abstract: A semiconductor manufacturing a method and an apparatus is described. That apparatus includes an ash chamber that has an ash chamber base, and a heating unit that is coupled to the ash chamber base. The heating unit applies heat to the ash chamber base to reduce deposition of residues onto ash chamber base surfaces, which could cause surface particle defects in a semiconductor device.
    Type: Grant
    Filed: March 26, 2001
    Date of Patent: May 20, 2003
    Assignee: Intel Corporation
    Inventors: Onofio L. Timperio, Stephen J. Luca
  • Plasma etcher with heated ash chamber base
    Publication number: 20020137354
    Abstract: A semiconductor manufacturing apparatus is described. That apparatus includes an ash chamber that has an ash chamber base, and a heating unit that is coupled to the ash chamber base. The heating unit applies heat to the ash chamber base to reduce deposition of residues onto ash chamber base surfaces, which could cause surface particle defects in a semiconductor device.
    Type: Application
    Filed: March 26, 2001
    Publication date: September 26, 2002
    Inventors: Onofio L. Timperio, Stephen J. Luca