Abstract: A polygon mirror rotates around a rotational axis. First and second reflection surfaces are placed on at least two of a plurality of sides of the polygon mirror, respectively. The first surface is formed in a planar shape inclined to a plane perpendicular to the rotational axis. The second surface is formed in a planar shape inclined with respect to a plane perpendicular to the rotational axis. Light which enters into the mirror is reflected by the first surface and then by the second surface. Among the sides, at least one of a direction in which the first surface is inclined with respect to a plane perpendicular to the rotational axis and a distance in the direction of the rotational axis between the first and second reflection surfaces is different.

Abstract: The light guide device includes a first light guide part, a polygon mirror, a second light guide part, and an adjustment part. The first light guide part reflects and guides the laser light emitted from the laser generator. The polygon mirror has a reflective part (33), and the reflective part (33) reflects the laser light guided by the first light guide part while the reflective part (33) rotates. The second light guide part reflects the laser light reflected at the reflective part (33) of the polygon mirror and directs the light so that the laser light is illuminated to the workpiece at each reflective part (33), respectively. The adjustment part adjusts the position of the light incident on the polygon mirror in the rotation axis direction of the optical axis, thereby changing the positions of light incident on the irradiation target in the line width direction. The irradiation target is irradiated with the light while the position of the light in a line width direction.

Abstract: An edge finishing device for a glass substrate as a brittle material substrate includes a first heating part and a second heating part. The first heating part heats an edge of the glass substrate to melt the edge for smoothing an unevenness. The second heating part heats near a position to be smoothed by the first heating part of a plate surface of the glass substrate at a temperature lower than a heating temperature of the first heating part.

Abstract: A light guide plate includes an incidence surface and an output surface. The incidence surface is an end surface on which light emitted from a light source is incident. The output surface is a surface from which incident light coming from the incidence surface is outputted, and is a plane orthogonal to a thickness direction. The incidence surface is at least partially curved toward the light source, when viewed in a cross-section cut along a plane parallel to both a thickness direction of the light guide plate and an arrangement direction in which the light source and the light guide plate are arranged.

Abstract: A chamfering apparatus includes: a laser beam transmissive member allowing a laser beam to be transmitted therethrough and contacting one surface of a workpiece, the laser beam transmissive member including an inclined surface that is inclined in an opposite direction to a chamfering direction relative to the one surface in a state where the laser beam transmissive member is in contact with the one surface; and a laser machining head configured to emit an ultrashort pulse laser beam for forming a laser filament inside an edge portion to the inclined surface of the laser beam transmissive member. The ultrashort pulse laser beam is transmitted through the laser beam transmissive member, incident on the one surface of the workpiece from the laser beam transmissive member, transmitted through the edge portion in the chamfering direction, and forms a laser filament inside the edge portion, the laser filament extending in the chamfering direction.

Abstract: A heating device (90) partially heats a glass substrate (1) to be chamfered along with relative movement of the glass substrate (1). The heating device (90) is provided with a main heating part (10) and a peripheral heating part (20). The main heating part (10) heats the glass substrate (1) to a temperature near a softening point of glass. The peripheral heating part (20) heats the glass substrate (1) to a temperature lower than or equal to a strain point of glass. The main heating part (10) is arranged near a position to be chamfered. The peripheral heating part (20) is, in a direction perpendicular to the relative movement direction of the glass substrate (1), arranged adjacent to the main heating part (10), and arranged on a side farther from a position where the thermal processing is subjected to the glass substrate (1), than the main heating part (10).

Abstract: A light guide plate includes an incidence surface and an output surface. The incidence surface is an end surface on which light emitted from a light source is incident. The output surface is a surface from which incident light coming from the incidence surface is outputted, and is a plane orthogonal to a thickness direction. The incidence surface is at least partially curved toward the light source, when viewed in a cross-section cut along a plane parallel to both a thickness direction of the light guide plate and an arrangement direction in which the light source and the light guide plate are arranged.

Abstract: A glass plate separating apparatus, as one example, includes: a trigger device that forms a start point flaw in a first main surface of a glass ribbon on a division-planned line; a pair of holding members disposed at the first main surface side of the glass ribbon; and a heater disposed at a second main surface side of the glass ribbon. The pair of holding members, each of which extends parallel to the division-planned line, is brought into contact with the glass ribbon at both sides of the division-planned line while being lowered together with the glass ribbon. The heater extends along the division-planned line, and is brought into contact with and pressed onto the glass ribbon on the division-planned line while being lowered together with the glass ribbon.

Abstract: A chamfering apparatus includes: a laser beam transmissive member allowing a laser beam to be transmitted therethrough and contacting one surface of a workpiece, the laser beam transmissive member including an inclined surface that is inclined in an opposite direction to a chamfering direction relative to the one surface in a state where the laser beam transmissive member is in contact with the one surface; and a laser machining head configured to emit an ultrashort pulse laser beam for forming a laser filament inside an edge portion to the inclined surface of the laser beam transmissive member. The ultrashort pulse laser beam is transmitted through the laser beam transmissive member, incident on the one surface of the workpiece from the laser beam transmissive member, transmitted through the edge portion in the chamfering direction, and forms a laser filament inside the edge portion, the laser filament extending in the chamfering direction.

Abstract: An optical scanning device includes: a light projector configured to radiate light while causing the light to make angular movement at a constant speed; and a light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on a predetermined scanning line. The light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point. The reflecting portions each include a plurality of reflecting surfaces. A length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.

Abstract: A glass plate separating apparatus, as one example, includes: a trigger device that forms a start point flaw in a first main surface of a glass ribbon on a division-planned line; a pair of holding members disposed at the first main surface side of the glass ribbon; and a heater disposed at a second main surface side of the glass ribbon. The pair of holding members, each of which extends parallel to the division-planned line, is brought into contact with the glass ribbon at both sides of the division-planned line while being lowered together with the glass ribbon. The heater extends along the division-planned line, and is brought into contact with and pressed onto the glass ribbon on the division-planned line while being lowered together with the glass ribbon.

Abstract: An optical scanning device includes: a projector configured to radiate laser light incident thereon while causing the laser light to make angular movement around a projection center, and a reflector with a parabolic surface, the reflector being configured to reflect the laser light from the projector. The projection center is positioned at a focal point of the parabolic surface. The projector radiates the laser light such that the greater a difference between a rotation angle of the laser light and a reference angle, the lower an angular speed of the laser light, the reference angle being the rotation angle of the laser light when the laser light reflects on a vertex of the parabolic surface. A laser machining device includes the optical scanning device, and is configured to cause the laser light from the reflector to fall on a workpiece to form a machining line.

Abstract: A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.

Abstract: A holding device to hold a side portion of a conveyed workpiece; a running device to convey the holding device in a feeding direction along a rail; and a support mechanism to support the holding device at front portion and rear portions of the mechanism. Eccentric shafts are with the holding device at respective positions, at one position, one of front and rear portions is eccentric in the feeding direction by a predetermined amount relative to one drive shaft's axis included in the running device. At the other position, one of front and rear portions is eccentric crossing the workpiece feeding direction by a predetermined amount relative to one drive shaft's axis in the running device. The yawing occurring while the workpiece is conveyed, is corrected by rotating the axes of eccentric shafts axes such the holding device moves relative to the running device's position.

Abstract: A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.

Abstract: An optical scanning device includes: a projector configured to radiate laser light incident thereon while causing the laser light to make angular movement around a projection center, and a reflector with a parabolic surface, the reflector being configured to reflect the laser light from the projector. The projection center is positioned at a focal point of the parabolic surface. The projector radiates the laser light such that the greater a difference between a rotation angle of the laser light and a reference angle, the lower an angular speed of the laser light, the reference angle being the rotation angle of the laser light when the laser light reflects on a vertex of the parabolic surface. A laser machining device includes the optical scanning device, and is configured to cause the laser light from the reflector to fall on a workpiece to form a machining line.

Abstract: A holding device to hold a side portion of a conveyed workpiece; a running device to convey the holding device in a feeding direction along a rail; and a support mechanism to support the holding device at front portion and rear portions of the mechanism. Eccentric shafts are with the holding device at respective positions, at one position, one of front and rear portions is eccentric in the feeding direction by a predetermined amount relative to one drive shaft's axis included in the running device. At the other position, one of front and rear portions is eccentric crossing the workpiece feeding direction by a predetermined amount relative to one drive shaft's axis in the running device. The yawing occurring while the workpiece is conveyed, is corrected by rotating the axes of eccentric shafts axes such the holding device moves relative to the running device's position.

Abstract: An optical scanning device includes: a light projector configured to radiate light while causing the light to make angular movement at a constant speed; and a light reflector configured to reflect the light radiated from the light projector to guide the light to an intended irradiated point on a predetermined scanning line. The light reflector includes a plurality of reflecting portions and reflects, at least twice, the light radiated from the light projector to guide the light to the intended irradiated point. The reflecting portions each include a plurality of reflecting surfaces. A length of an optical path from the light projector to the irradiated point is substantially constant for all of irradiated points on the scanning line, and a scanning speed, on the scanning line, of the light radiated from the light projector is substantially constant.