Abstract: An air conditioning apparatus includes a refrigerant circuit in which a compressor for compressing heat source-side refrigerant, a first refrigerant channel switching device, a heat source side heat exchanger, an expansion device, and intermediate heat exchangers for performing heat exchange between the heat source-side refrigerant and a heat medium different from the heat source-side refrigerant are connected by pipes. Also, the air conditioning apparatus includes a heat medium circuit in which pumps for circulating the heat medium to be used for the heat exchange performed by the intermediate heat exchangers, a use-side heat exchanger, and channel switching devices for switching passages of the heat medium heated or cooled to the use-side heat exchanger are connected by pipes.

Abstract: In an air-conditioning apparatus, when a plurality of pumps are all operating and a heat exchange amount in use-side heat exchangers is equal to or lower than a lower limit of a thermal capacity that can be conveyed in a heat medium circuit B, before at least one of the plurality of pumps is stopped, a refrigerant flow path in the intermediate heat exchanger connected to the pump that is to be stopped is closed. Then, the at least one of the plurality of pumps is stopped, and the thermal capacity required in at least one of the use-side heat exchangers in the rest of the plurality of pumps is conveyed.

Abstract: In an air-conditioning apparatus including a plurality of indoor units connected to a heat medium converter and a plurality of remote controllers respectively provided for the indoor units, the remote controllers each include a temperature sensor that detect a temperature of a corresponding space to be air-conditioned, and are each configured to communicate with a heat medium converter controller of the heat medium converter and an indoor unit controller of the corresponding indoor unit, transmit an instruction to start and stop an operation and data related to rotation speed of an indoor air-sending device to the corresponding indoor unit controller, and transmit the instruction to start and stop the operation, and a target temperature and a temperature detected by the temperature sensor or a difference therebetween, to the heat medium converter controller.

Abstract: An air-conditioning apparatus includes actuation control means including an actuation unit that sequentially opens heat medium flow switching devices or heat medium flow control devices on a one-by-one basis. The actuation control means performs control in such a manner that start time of driving of pumps is later than start of actuation of the heat medium flow switching devices and the heat medium flow control devices.

Abstract: An air-conditioning apparatus includes a heat medium temperature adjustment operation mode in which when the temperature of a heat medium falls outside a predetermined temperature range while a compressor and a pump are kept stopped, the compressor and the pump are driven to cause an intermediate heat exchanger to exchange heat between a refrigerant and the heat medium so that the heat medium is heated or cooled to have a temperature that falls within the temperature range.

Abstract: An air conditioner includes: a heat source-side unit having a compressor, a heat source-side heat exchanger, a first throttle device and a super-cooling heat exchanger; a load-side unit having a second throttle device and a load-side heat exchanger; a switching device for switching connections of discharge and intake sides of the compressor between the heat source-side unit and the load-side unit; a refrigerant reservoir supplying refrigerant and connected to a refrigerating cycle between the first throttle device of the heat source-side unit and the heat source-side heat exchanger through a refrigerant filling switch valve; and a controller controlling the switching device, the first throttle device, the second throttle device and refrigerant filling switch valve.

Abstract: An air-conditioning apparatus includes an injection pipe allowing a part of a refrigerant, as discharged from a compressing device, to flow into an intermediate portion of a compression stroke of the compressing device, and an injection internal heat exchanger that exchanges heat between a refrigerant stream that flows through the injection pipe and a refrigerant stream that flows into a heat-source-side heat exchanger after passing through an indoor unit.

Abstract: A multi-room air-conditioning apparatus includes an outdoor unit, a relay unit connected to an outdoor unit by first and second connection pipes, and a plurality of indoor units connected to the relay unit. The outdoor unit includes a second gas-liquid separating device provided on the suction side of the compressor. The suction side of the compressor and the second gas-liquid separating device are connected to each other by a gas-side outlet pipe and a liquid-side outlet pipe.

Abstract: An air-conditioning apparatus includes a compressor, an indoor heat exchanger configured to function as a condenser or an evaporator, indoor heat exchanges each configured to function as a condenser or an evaporator, a plurality of expansion valves each provided for a corresponding one of the indoor heat exchangers each configured to adjust a flow rate of a refrigerant that flows through the corresponding indoor heat exchanger and a controller configured to control an operation capacity of the compressor and opening degrees of a plurality of expansion devices. When increasing heat exchange performance of the indoor heat exchanger, the controller increases the operation capacity of the compressor and controls the opening degree of the expansion valve corresponding to the indoor heat exchanger to decrease the flow rate of the refrigerant that flows through the indoor heat exchanger.

Abstract: An air-conditioning apparatus is provided to which, even when a heat medium leaks from a heat medium circuit for some reason and air enters the heat medium circuit, the heat medium circuit can be automatically refilled with the heat medium before a pump is heated and damaged. When it is determined that a rotational speed of a pump is higher than an upper rotational speed limit, the controller determines that the heat medium is leaking from the heat medium circuit and performs a heat-medium-introducing and air-purging control process.

Abstract: A lithography apparatus includes a measuring station that includes a first measuring device configured to measure a height of a substrate holder, and a second measuring device configured to measure a height of a surface of a substrate held by the holder, and a patterning station that includes a third measuring device configured to measure a height of the holder, and patterns the substrate held by the holder based on an output of the second measuring device. The patterning station includes a fourth measuring device configured to measure a height of a surface of a substrate held by the holder. The lithography apparatus includes a controller configured to obtain a correction value for an output obtained from at least one of the first and third measuring devices based on outputs of the second and fourth measuring devices with respect to a substrate held by the holder.

Abstract: An air-conditioning apparatus according to the present invention includes at least indoor heat exchangers. In response to a request to increase heat exchange performance from the indoor heat exchanger, the air-conditioning apparatus decreases a heat exchange capacity of an outdoor heat exchanger and controls an opening degree of an expansion valve corresponding to the indoor heat exchanger a to decrease a flow rate of a refrigerant that flows through the indoor heat exchanger.

Abstract: The present invention provides a method for calibrating an encoder which includes a scale and a light receiving unit configured to receive light reflected by the scale, and detects a change in relative position between the scale and the light receiving unit, the method comprising a measurement step of measuring a deformation amount of a surface shape of the scale, a specifying step of specifying, based on a measurement result in the measurement step, a range which includes a portion of a surface of the scale, where the deformation amount exceeds a threshold, and within which a detection value of the encoder is corrected, and a determination step of determining a correction value for correcting the detection value of the encoder within the range specified in the specifying step.

Abstract: A refrigerating air-conditioning apparatus, at least provided with no possibility that a foreign material returns to a compressor from an accumulator at a time of the pipeline-cleaning operation firstly, and provided with a possibility to perform a collecting operation for the foreign material in a short time secondary, is provided. The heat-source side unit includes an accumulator provided with a function to separate and collect the foreign material in an existing pipeline, a collecting container for collecting the foreign material separated by the accumulator, and an oil return pipeline for returning refrigerating machine oil to the compressor via a flow amount adjusting device, installed at a lower portion of the accumulator, and at a time of ordinary cooling or heating operation, the refrigerating machine oil is caused to flow into the oil return pipeline, and at a time of pipeline cleaning and foreign material-collecting operations, the flow amount adjusting device is fully closed.

Abstract: A valve body in each of heat medium flow switching devices has an open portion. When the length from a connection between a first passage pipe and a third passage pipe to a connection between a second passage pipe and the third passage pipe is defined as a casing passage width, a valve body passage width of the open portion in a direction substantially perpendicular to the axis of the valve body is smaller than the casing passage width.

Abstract: A method for selecting a heat medium in installing an air-conditioning system includes: determining power required for use side heat exchangers corresponding to a plurality of air-conditioned spaces; calculating a total refrigerant amount required when a refrigerant is circulated through all the use side heat exchangers having the determined power; calculating a refrigerant concentration when the total refrigerant amount leaks to each air-conditioned space using the refrigerant, for each air-conditioned space; determining the refrigerant concentration for each air-conditioned space exceeds a predetermined limit concentration; when any air-conditioned space exceeds the limit concentration, selecting, as a nontoxic medium, the circulation heat medium of the use side heat exchanger installed in one of the air-conditioned spaces; and calculating a total refrigerant amount required when the refrigerant is circulated through all other use side heat exchangers.

Abstract: An air-conditioning apparatus includes a refrigeration cycle that includes one or more intermediate heat exchangers, exchanging heat between a heat source side refrigerant and a heat medium different from the heat source side refrigerant, a heat medium circuit that includes at least one pump configured to circulate the heat medium for heat exchange by the intermediate heat exchanger, a use side heat exchanger configured to exchange heat between the heat medium and air in an air-conditioning target space, and flow switching valves configured to switch between passing the heated heat medium through the use side heat exchanger and passing the cooled heat medium through the use side heat exchanger and in which the pump, the use side heat exchanger, and the flow switching valves are connected by pipes, and a controller configured to calculate an actual temperature efficiency ratio based on a temperature at a heat medium inlet of the heat exchanger in the heat medium circuit and determine whether a flow rate of the

Abstract: An apparatus which projects a pattern of an original onto a substrate by a projection optical system within a chamber to expose the substrate, comprises a measurement unit which performs measurement to calculate a deformation amount of the original, and a controller which calculates a predicted deformation amount of the original and corrects a projection magnification of the projection optical system so as to correct the predicted deformation amount, based on information representing a relationship between the deformation amount with reference to a shape of the original at a certain temperature and a time for which the original receives exposure light, a deformation amount of the original before exposure determined based on a measurement value obtained by measuring, by the measurement unit, the deformation amount of the original loaded into the chamber and unused for exposure, and the time for which the original receives the exposure light.