Patents by Inventor Pamidighantam Bharathi

Pamidighantam Bharathi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dendritic material sacrificial layer micro-scale gap formation method
    Patent number: 6248668
    Abstract: A micro-scale gap fabrication process using a dry releasable dendritic material sacrificial layer. The fabrication process produces micro-scale gaps, such as those required between a suspended microstructure and an opposing surface in MEMS. The dendritic sacrificial layer is releasable by heating the dendritic material past its decomposition point after forming the microstructure. The sacrificial layer may be applied to a wafer, for example, by spin coating a solution including the dissolved dendritic material. The sacrificial layer, after being formed, may be patterned and prepared for accepting structural material for the microstructure. After a desired microstructure or microstructures are formed around the sacrificial layer, the layer is dry releasable by heating.
    Type: Grant
    Filed: January 14, 2000
    Date of Patent: June 19, 2001
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: David Beebe, Hyuk-Jeen Suh, Jeffrey S. Moore, Pamidighantam Bharathi