Patents by Inventor Parthiban BALAKRISHNA

Parthiban BALAKRISHNA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Source RF power split inner coil to improve BCD and etch depth performance
    Patent number: 10211030
    Abstract: Embodiments of the present disclosure include a radial frequency plasma source having a split type inner coil assembly. In one embodiment, the split type inner coil assembly comprises two intertwining coils. In another embodiment, the split type inner coil assembly includes looped coils forming a dome.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: February 19, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Rongping Wang, Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Peter Demonte, Parthiban Balakrishna
  • SOURCE RF POWER SPLIT INNER COIL TO IMPROVE BCD AND ETCH DEPTH PERFORMANCE
    Publication number: 20170200585
    Abstract: Embodiments of the present disclosure include a radial frequency plasma source having a split type inner coil assembly. In one embodiment, the split type inner coil assembly comprises two intertwining coils. In another embodiment, the split type inner coil assembly includes looped coils forming a dome.
    Type: Application
    Filed: June 15, 2015
    Publication date: July 13, 2017
    Applicant: Applied Materials, Inc.
    Inventors: Rongping WANG, Ruizhe REN, Jon C. FARR, Chethan MANGALORE, Peter DEMONTE, Parthiban BALAKRISHNA