Patents by Inventor Patricia Le Coupanec
Patricia Le Coupanec has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 7439730Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: GrantFiled: December 8, 2005Date of Patent: October 21, 2008Assignee: DCG Systems, Inc.Inventors: Romain Desplats, Patricia Le Coupanec, William K. Lo, Philippe Perdu, Steven Kasapi
-
Patent number: 7323862Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: GrantFiled: April 25, 2006Date of Patent: January 29, 2008Assignee: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William K. Lo, Philippe Perdu, Steven Kasapi
-
Patent number: 7115426Abstract: A method for utilizing interference fringe patterns generated when milling a trench through a semiconductor substrate by a method such as FIB milling, to determine and optimize the thickness uniformity of the trench bottom. The interference fringes may be mapped and the mapping used to direct the FIB milling to those regions which are thicker to correct observed non-uniformities in the trench floor thickness by varying the pixel dwell time across the milled area. The interference fringe mapping may be used to develop computerized contour lines to automate the pixel dwell time variations as described above, for correcting non-uniformities in the trench floor thickness. The method may be applied to applications other than trench formation for backside editing, such as monitoring progress in forming a milled object.Type: GrantFiled: January 7, 2005Date of Patent: October 3, 2006Assignee: Credence Systems CorporationInventors: Erwan Le Roy, Patricia Le Coupanec, Theodore R. Lundquist, William B. Thompson, Mark A. Thompson, Lokesh Johri
-
Patent number: 7113630Abstract: Methods, apparatus and data structures useful in correcting PICA image data are described. An exemplary method comprises acquiring optical image data of a target having identifiable optical-image features, acquiring PICA image data of the target having identifiable PICA-image features corresponding to the optical-image features, matching PICA-image features with corresponding optical-image features, and calculating from matched PICA-image features and optical-image features a set of coefficients defining relationships between observed positions of PICA-image features and optical-image features. Corrections are applied to the observed positions of detected photons based on the coefficients. The coefficients may provide a local correction using a bilinear relationship giving the transformation of a rectangle formed by four features of the PICA-image data to fit a corresponding rectangle in the optical-image data.Type: GrantFiled: February 19, 2002Date of Patent: September 26, 2006Assignee: Credence Systems CorporationInventors: Girish Dajee, Patricia Le Coupanec, Martin D. Leibowitz
-
Publication number: 20060181268Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: ApplicationFiled: April 25, 2006Publication date: August 17, 2006Applicant: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William Lo, Philippe Perdu, Steven Kasapi
-
Publication number: 20060108997Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: ApplicationFiled: December 8, 2005Publication date: May 25, 2006Applicant: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William Lo, Philippe Perdu, Steven Kasapi
-
Patent number: 7038442Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: GrantFiled: January 20, 2005Date of Patent: May 2, 2006Assignee: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William K. Lo, Philippe Perdu, Steven Kasapi
-
Publication number: 20050146321Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: ApplicationFiled: January 20, 2005Publication date: July 7, 2005Applicant: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William Lo, Philippe Perdu, Steven Kasapi
-
Patent number: 6891363Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: GrantFiled: September 3, 2002Date of Patent: May 10, 2005Assignee: Credence Systems CorporationInventors: Romain Desplats, Patricia Le Coupanec, William K. Lo, Philippe Perdu, Steven Kasapi
-
Publication number: 20040041575Abstract: A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.Type: ApplicationFiled: September 3, 2002Publication date: March 4, 2004Inventors: Romain Desplats, Patricia Le Coupanec, William K. Lo, Philippe Perdu, Steven Kasapi
-
Publication number: 20030156750Abstract: Methods, apparatus and data structures useful in correcting PICA image data are described. An exemplary method comprises acquiring optical image data of a target having identifiable optical-image features, acquiring PICA image data of the target having identifiable PICA-image features corresponding to the optical-image features, matching PICA-image features with corresponding optical-image features, and calculating from matched PICA-image features and optical-image features a set of coefficients defining relationships between observed positions of PICA-image features and optical-image features. Corrections are applied to the observed positions of detected photons based on the coefficients. The coefficients may provide a local correction using a bilinear relationship giving the transformation of a rectangle formed by four features of the PICA-image data to fit a corresponding rectangle in the optical-image data.Type: ApplicationFiled: February 19, 2002Publication date: August 21, 2003Inventors: Girish Dajee, Patricia Le Coupanec, Martin D. Leibowitz