Abstract: Provided herein are low resistance metallization stack structures for logic and memory applications and related methods of fabrication. In some embodiments, thin metal oxynitride or metal nitride nucleation layers are deposited followed by deposition of a pure metal conductor. The nucleation layer is amorphous, which templates large pure metal film grain growth and reduced resistivity. Further, certain embodiments of the methods described below convert most or all of the metal oxynitride nucleation layer to a pure metal layer, further lowering the resistivity.

Abstract: Provided herein are low resistance metallization stack structures for 3D-NAND applications and related methods of fabrication. In some embodiments, thin metal oxynitride nucleation layers are deposited on dielectric material followed by deposition of a pure metal conductor using process conditions that increase non-molybdenum component element content at the oxynitride-dielectric interface. Certain embodiments of the methods described below convert less than all of the metal oxynitride nucleation layer to a pure metal layer, further lowering the resistivity.

Abstract: A system, method and apparatus for displaying real time auxiliary information from a secondary source or input signal in combination with a program from a separate primary source. The auxiliary information (e.g. textual, graphical or video images) is selectable and is received through a second, integral or stand-alone tuner. The selected information can be displayed (1) continuously, (2) at predefined regular intervals, or (3) as the (defined) event(s) occur either in real time or in memory to provide a short delay time. The auxiliary information may be part of a currently transmitted data stream or as a separate data stream.

Abstract: A vapor analysis system comprising a vapor analyzer capable of collecting and analyzing a vapor sample for detection of a compound that may be contained within the vapor sample. A controller is coupled to the vapor analyzer. The controller is programmed to produce an indicator signal indicative of a relative concentration of the compound detected by the vapor analyzer within the vapor sample. A sample probe includes a housing containing a vapor channel through which the vapor sample is collected, and a vapor cable couples the sample probe to the vapor analyzer to allow collection and channeling of the vapor sample to the vapor analyzer. A multi-dimensional user indicator is disposed on the housing of the sample probe receives and operates in response to the indicator signal to indicate the relative concentration of the compound detected within the vapor sample for presentation via a multi-directional stimulus to a user of the vapor analysis system.

Abstract: A system, method and apparatus for displaying real time auxiliary information from a secondary source or input signal in combination with a program from a separate primary source. The auxiliary information (e.g. textual, graphical or video images) is selectable and is received through a second, integral or stand-alone tuner. The selected information can be displayed (1) continuously, (2) at predefined regular intervals, or (3) as the (defined) event(s) occur either in real time or in memory to provide a short delay time. The auxiliary information may be part of a currently transmitted data stream or as a separate data stream.