Patents by Inventor Patrick L. Nelissen

Patrick L. Nelissen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for managing light source operation
    Patent number: 8295316
    Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: October 23, 2012
    Assignee: Cymer, Inc.
    Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
  • Method and System for Managing Light Source Operation
    Publication number: 20110235663
    Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
    Type: Application
    Filed: March 24, 2010
    Publication date: September 29, 2011
    Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J.W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen