Patents by Inventor Patrick STEGLICH
Patrick STEGLICH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11988904Abstract: The present invention relates to a slot waveguide formed by a vertical material stack comprising a top layer with a first refractive index, a center layer including a ferroelectric material and with a second refractive index, and a Si1-xGex pseudosubstrate layer with 0<x?1 and with a third refractive index. The center layer is grown on the Si1-xGex pseudosubstrate layer. The second refractive index is lower than the first refractive index and lower than the third refractive index. The slot waveguide can be included in a phase-shifter including two vertically arranged electrodes configured for providing a vertical electrical field (Ev) extending between the top layer and the bottom layer of the slot waveguide and for providing a complementary-metal-oxide-semiconductor compatible driver voltage. The phase-shifter can be configured for providing a linear electro-optical effect inside the center layer of the slot waveguide.Type: GrantFiled: December 21, 2021Date of Patent: May 21, 2024Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIKInventors: Andreas Mai, Patrick Steglich, Christian Mai, Catherine Dubourdieu, Veeresh Deshpande, Dong-Jik Kim
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Patent number: 11988939Abstract: The present invention relates to producing an electro-optical phase shifter such that it may be integrated into a front-end of line of an electronic-photonic integrated circuit. A conducting bottom layer with a first refractive index is provided. A center layer including a ferroelectric material and with a second refractive index is provided on top of a first region of the conducting bottom layer, such that the center layer is not on top of a second region of the conducting bottom layer. A conducting top layer with a third refractive index is provided on top of the center layer. The second refractive index is lower than the first refractive index and lower than the third refractive index, such that the conducting bottom layer, the center layer, and the conducting top layer form a slot waveguide. A first electrical connector which connects the second region of the conducting bottom layer with an upper layer is provided.Type: GrantFiled: February 2, 2022Date of Patent: May 21, 2024Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIKInventors: Andreas Mai, Patrick Steglich, Christian Mai
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Publication number: 20220244614Abstract: The present invention relates to producing an electro-optical phase shifter such that it may be integrated into a front-end of line of an electronic-photonic integrated circuit. A conducting bottom layer with a first refractive index is provided. A center layer including a ferroelectric material and with a second refractive index is provided on top of a first region of the conducting bottom layer, such that the center layer is not on top of a second region of the conducting bottom layer. A conducting top layer with a third refractive index is provided on top of the center layer. The second refractive index is lower than the first refractive index and lower than the third refractive index, such that the conducting bottom layer, the center layer, and the conducting top layer form a slot waveguide. A first electrical connector which connects the second region of the conducting bottom layer with an upper layer is provided.Type: ApplicationFiled: February 2, 2022Publication date: August 4, 2022Inventors: Andreas MAI, Patrick STEGLICH, Christian MAI
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Publication number: 20220197066Abstract: The present invention relates to a slot waveguide formed by a vertical material stack comprising a top layer with a first refractive index, a center layer including a ferroelectric material and with a second refractive index, and a Si1-xGex pseudosubstrate layer with 0<x?1 and with a third refractive index. The center layer is grown on the Si1-xGex pseudosubstrate layer. The second refractive index is lower than the first refractive index and lower than the third refractive index. The slot waveguide can be included in a phase-shifter including two vertically arranged electrodes configured for providing a vertical electrical field (E) extending between the top layer and the bottom layer of the slot waveguide and for providing a complementary-metal-oxide-semiconductor compatible driver voltage. The phase-shifter can be configured for providing a linear electro-optical effect inside the center layer of the slot waveguide.Type: ApplicationFiled: December 21, 2021Publication date: June 23, 2022Applicant: Helmholtz-Zentrum Berlin für Materialien und Energie GmbHInventors: Andreas MAI, Patrick STEGLICH, Christian MAI, Catherine DUBOURDIEU, Veeresh DESHPANDE, Dong-Jik KIM
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Patent number: 11092742Abstract: The invention relates to a photonic sensor chip comprising a semiconductor substrate with a cavity extending from a back side through an entire depth of the semiconductor substrate, a photonic plane located on the front side of the semiconductor substrate. The chip includes a photonic particle sensor element with an active-surface element having an exposed active surface facing towards the back side of the semiconductor substrate, for capturing selected particles from at least one fluid or gas to which the active surface is exposable. The cavity provides access to the active surface from the back side. The photonic particle sensor element receives an optical input wave via the photonic plane, to expose captured particles on the active-surface element to interaction with the optical input wave and to provide a resulting optical output wave having a spectral component indicative of the interaction between the optical input wave and captured particles.Type: GrantFiled: December 18, 2019Date of Patent: August 17, 2021Inventors: Patrick Steglich, Andreas Mai, Christian Mai
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Patent number: 10833056Abstract: The invention relates to an electrooptical device comprising a semiconductor substrate having a front side and a back side, at least one photonic component arranged on the front side of the semiconductor substrate, the photonic component comprising an active layer made of a non-linear optical material, wherein at least one cavity, extends through the semiconductor substrate and connects the active layer on the front side of the semiconductor substrate with the back side of the semiconductor substrate.Type: GrantFiled: December 17, 2018Date of Patent: November 10, 2020Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIKInventors: Patrick Steglich, Andreas Mai, Christian Mai, Sigurd Schrader
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Publication number: 20200200972Abstract: The invention relates to a photonic sensor chip comprising a semiconductor substrate with a cavity extending from a back side through an entire depth of the semiconductor substrate, a photonic plane located on the front side of the semiconductor substrate. The chip includes a photonic particle sensor element with an active-surface element having an exposed active surface facing towards the back side of the semiconductor substrate, for capturing selected particles from at least one fluid or gas to which the active surface is exposable. The cavity provides access to the active surface from the back side. The photonic particle sensor element receives an optical input wave via the photonic plane, to expose captured particles on the active-surface element to interaction with the optical input wave and to provide a resulting optical output wave having a spectral component indicative of the interaction between the optical input wave and captured particles.Type: ApplicationFiled: December 18, 2019Publication date: June 25, 2020Inventors: Patrick STEGLICH, Andreas MAI, Christian MAI
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Publication number: 20190206850Abstract: The invention relates to an electrooptical device comprising a semiconductor substrate having a front side and a back side, at least one photonic component arranged on the front side of the semiconductor substrate, the photonic component comprising an active layer made of a non-linear optical material, wherein at least one cavity, extends through the semiconductor substrate and connects the active layer on the front side of the semiconductor substrate with the back side of the semiconductor substrate.Type: ApplicationFiled: December 17, 2018Publication date: July 4, 2019Inventors: Patrick Steglich, Andreas Mai, Christian Mai, Sigurd Schrader
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Patent number: 10165935Abstract: A measuring head of an endoscopic device is provided. The measuring head has an optical projection unit (projection optics) intended and designed to illuminate an object to be examined with light, and an optical measurement unit (measurement optics) intended and designed to record the light reflected or diffused from the object to be examined. It is provided that the optical measurement unit (measurement optics) has an aperture diaphragm of which the aperture is settable.Type: GrantFiled: January 27, 2016Date of Patent: January 1, 2019Assignee: Rolls-Royce Deutschland Ltd & Co KGInventors: Joachim Bauer, Sigurd Schrader, Martin Burger, Silvio Pulwer, Friedhelm Heinrich, Viachaslau Ksianzou, Patrick Steglich, Jean Blondeau, Claus Villringer
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Publication number: 20160220104Abstract: A measuring head of an endoscopic device is provided. The measuring head has an optical projection unit (projection optics) intended and designed to illuminate an object to be examined with light, and an optical measurement unit (measurement optics) intended and designed to record the light reflected or diffused from the object to be examined. It is provided that the optical measurement unit (measurement optics) has an aperture diaphragm of which the aperture is settable.Type: ApplicationFiled: January 27, 2016Publication date: August 4, 2016Inventors: Joachim BAUER, Sigurd SCHRADER, Martin BURGER, Silvio PULWER, Friedhelm HEINRICH, Viachaslau KSIANZOU, Patrick STEGLICH, Jean BLONDEAU, Claus VILLRINGER