Patents by Inventor Patty P. L. Chang-Chien

Patty P. L. Chang-Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND SYSTEM FOR LOCALLY SEALING A VACUUM MICROCAVITY, METHODS AND SYSTEMS FOR MONITORING AND CONTROLLING PRESSURE AND METHOD AND SYSTEM FOR TRIMMING RESONANT FREQUENCY OF A MICROSTRUCTURE THEREIN
    Patent number: 7004015
    Abstract: A method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure in the microcavity and method and system for trimming resonant frequency of a microstructure in the microcavity are provided. The microcavity has an initial base pressure therein after the microcavity is locally sealed at an access passageway. The monitoring and control methods include measuring pressure in the microcavity and providing a signal when the pressure exceeds a maximum desired level. The control method also includes reducing the pressure in the microcavity to a pressure at or below the maximum desired level in response to the signal to compensate for vacuum degradation within the vacuum microcavity.
    Type: Grant
    Filed: October 21, 2002
    Date of Patent: February 28, 2006
    Assignee: The Regents of the University of Michigan
    Inventors: Patty P. L. Chang-Chien, Kensall D. Wise
  • Method and system for locally sealing a vacuum microcavity, Methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein
    Publication number: 20030089394
    Abstract: A method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure in the microcavity and method and system for trimming resonant frequency of a microstructure in the microcavity are provided. The microcavity has an initial base pressure therein after the microcavity is locally sealed at an access passageway. The monitoring and control methods include measuring pressure in the microcavity and providing a signal when the pressure exceeds a maximum desired level. The control method also includes reducing the pressure in the microcavity to a pressure at or below the maximum desired level in response to the signal to compensate for vacuum degradation within the vacuum microcavity.
    Type: Application
    Filed: October 21, 2002
    Publication date: May 15, 2003
    Inventors: Patty P.L. Chang-Chien, Kensall D. Wise