Patents by Inventor PAUL DENSLEY

PAUL DENSLEY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching apparatus
    Patent number: 10153135
    Abstract: An ICP plasma etching apparatus for etching a substrate includes at least one chamber, a substrate support positioned within the chamber, a plasma production device for producing a plasma for use in etching the substrate, and a protective structure which surrounds the substrate support so that, in use, a peripheral portion of the substrate is protected from unwanted deposition of material. The protective structure is arranged to be electrically biased and is formed from a metallic material so that metallic material can be sputtered from the protective structure onto an interior surface of the chamber to adhere particulate material to the interior surface.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: December 11, 2018
    Assignee: SPTS TECHNOLOGIES LIMITED
    Inventors: Anthony Paul Wilby, Stephen R Burgess, Ian Moncrieff, Paul Densley, Clive L Widdicks, Paul Rich, Adrian Thomas
  • PLASMA ETCHING APPARATUS
    Publication number: 20160379807
    Abstract: An ICP plasma etching apparatus for etching a substrate includes at least one chamber, a substrate support positioned within the chamber, a plasma production device for producing a plasma for use in etching the substrate, and a protective structure which surrounds the substrate support so that, in use, a peripheral portion of the substrate is protected from unwanted deposition of material. The protective structure is arranged to be electrically biased and is formed from a metallic material so that metallic material can be sputtered from the protective structure onto an interior surface of the chamber to adhere particulate material to the interior surface.
    Type: Application
    Filed: June 23, 2016
    Publication date: December 29, 2016
    Inventors: ANTHONY PAUL WILBY, STEPHEN R. BURGESS, IAN MONCRIEFF, PAUL DENSLEY, CLIVE L. WIDDICKS, PAUL RICH, ADRIAN THOMAS