Patents by Inventor Paul G. Dewa
Paul G. Dewa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9690108Abstract: A micro-electro-mechanical (MEMS) based surveillance system and a method for using the MEMS based surveillance system are described herein for imaging an object. In one example, the MEMS based surveillance system can record images of an object from four different wavelength regions including visible light, near-infrared light, infrared light, and far infrared light.Type: GrantFiled: August 30, 2011Date of Patent: June 27, 2017Assignee: Corning IncorporatedInventors: Paul G Dewa, Richard L Wiggins
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Patent number: 8913241Abstract: A hyperspectral imaging system and method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). The hyperspectral imaging system includes at least one optic, a scannable slit mechanism, a spectrometer, a two-dimensional image sensor, and a controller. The scannable slit mechanism can be a micro-electromechanical system spatial light modulator (MEMS SLM), a diffractive Micro-Opto-Electro-Mechanical Systems (MOEMS) spatial light modulator (SLM), a digital light processing (DLP) system, a liquid crystal display, a rotating drum with at least one slit formed therein, or a rotating disk with at least one slit formed therein.Type: GrantFiled: July 23, 2012Date of Patent: December 16, 2014Assignee: Corning IncorporatedInventors: Vikram Bhatia, Carl Edgar Crossland, Paul G Dewa, Michael Lucien Genier
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Patent number: 8830581Abstract: A polarization switching apparatus has a first birefringent polarizer formed as a composite prism and disposed to direct incident light of a first polarization along a first optical path and light of a second polarization along a second optical path, wherein the second optical path is oblique to the first optical path. A beam redirector is disposed to redirect the first optical path from the first birefringent polarizer toward an input face of a second birefringent polarizer; wherein the second birefringent polarizer is also formed as a composite prism and is disposed to combine incident light of the first and second polarizations onto a common output path. A shutter apparatus is actuable to selectively block light of the first polarization or light of the second polarization from the input face of the second birefringent polarizer.Type: GrantFiled: May 2, 2012Date of Patent: September 9, 2014Assignee: Corning IncorporatedInventors: Paul G Dewa, Michael M Dunn, Stephen K Mack, Brian Monroe McMaster, Robert L Michaels, Paul Francis Michaloski
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Publication number: 20140022414Abstract: A hyperspectral imaging system and method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). The hyperspectral imaging system includes at least one optic, a scannable slit mechanism, a spectrometer, a two-dimensional image sensor, and a controller. The scannable slit mechanism can be a micro-electromechanical system spatial light modulator (MEMS SLM), a diffractive Micro-Opto-Electro-Mechanical Systems (MOEMS) spatial light modulator (SLM), a digital light processing (DLP) system, a liquid crystal display, a rotating drum with at least one slit formed therein, or a rotating disk with at least one slit formed therein.Type: ApplicationFiled: July 23, 2012Publication date: January 23, 2014Inventors: Vikram Bhatia, Carl Edgar Crossland, Paul G. Dewa, Michael Lucien Genier
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Patent number: 8492448Abstract: Systems and methods for performing photoreactions in a photoreactive material using scattered actinic light from at least one light-diffusing optical fiber are disclosed. The systems and methods include disposing a light-diffusing optical fiber relative to the photoreactive material. The light-diffusing optical fiber has a glass core, a surrounding cladding, and nano-sized structures situated either within the glass core or at the core-cladding boundary. The nano-sized structures are configured to scatter guided actinic light that travels in the light-diffusing optical fiber from an actinic light source. The scattered actinic light is provided throughout the photoreactive material and causes a photoreaction throughout the photoreactive material.Type: GrantFiled: October 7, 2011Date of Patent: July 23, 2013Assignee: Corning IncorporatedInventors: Paul G Dewa, Stephan Lvovich Logunov, Paul John Shustack
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Publication number: 20130090402Abstract: Systems and methods for performing photoreactions in a photoreactive material using scattered actinic light from at least one light-diffusing optical fiber are disclosed. The systems and methods include disposing a light-diffusing optical fiber relative to the photoreactive material. The light-diffusing optical fiber has a glass core, a surrounding cladding, and nano-sized structures situated either within the glass core or at the core-cladding boundary. The nano-sized structures are configured to scatter guided actinic light that travels in the light-diffusing optical fiber from an actinic light source. The scattered actinic light is provided throughout the photoreactive material and causes a photoreaction throughout the photoreactive material.Type: ApplicationFiled: October 7, 2011Publication date: April 11, 2013Inventors: Paul G. Dewa, Stephan Lvovich Logunov, Paul John Shustack
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Publication number: 20130070331Abstract: A polarization switching apparatus has a first birefringent polarizer formed as a composite prism and disposed to direct incident light of a first polarization along a first optical path and light of a second polarization along a second optical path, wherein the second optical path is oblique to the first optical path. A beam redirector is disposed to redirect the first optical path from the first birefringent polarizer toward an input face of a second birefringent polarizer; wherein the second birefringent polarizer is also formed as a composite prism and is disposed to combine incident light of the first and second polarizations onto a common output path. A shutter apparatus is actuable to selectively block light of the first polarization or light of the second polarization from the input face of the second birefringent polarizer.Type: ApplicationFiled: May 2, 2012Publication date: March 21, 2013Inventors: Paul G. Dewa, Michael M. Dunn, Stephen K. Mack, Brian Monroe McMaster, Robert L. Michaels, Paul Francis Michaloski
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Publication number: 20120114875Abstract: The present disclosure is directed to a method for determining the state of cleanliness of an optical component (an optic) before any coating is applied to the surface. In method is particularly applicable to optical elements and components that are intended for uses in the DUV (deep ultraviolet) and EUV (extreme ultraviolet) wavelength regions. The disclosure combines a cleaning procedure with contamination metrology utilizing a spectrometer to provide a method that will determine the state of cleanliness of the component surface by measurement of the fluorescence spectrum of the optic and comparing the measured value with a standard or reference optic of known, acceptable cleanliness. The disclosure is further directed to an optic having a selected coating thereon that is formed according to the method described herein.Type: ApplicationFiled: October 31, 2011Publication date: May 10, 2012Inventor: Paul G. Dewa
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Publication number: 20120050533Abstract: A micro-electro-mechanical (MEMS) based surveillance system and a method for using the MEMS based surveillance system are described herein for imaging an object. In one example, the MEMS based surveillance system can record images of an object from four different wavelength regions including visible light, near-infrared light, infrared light, and far infrared light.Type: ApplicationFiled: August 30, 2011Publication date: March 1, 2012Inventors: Paul G. Dewa, Richard L. Wiggins
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Publication number: 20100188723Abstract: An apparatus for providing a modulated pulsed radiation beam (20) has a radiation source (16) for providing a pulsed radiation beam (10) at a constant pulse repetition frequency and a number of beam intensity modulators (18a-18e). A beam-deflecting element (12) in the path of the pulsed radiation beam and rotatable about an axis redirects the pulsed radiation beam cyclically towards each of the plurality of beam intensity modulators in turn. A beam-recombining element rotatable about the axis in synchronization with the beam-deflecting element combines modulated light, from each of the beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency. At least one beam-pointing correction apparatus optically conjugates the beam-deflecting element and the beam recombining element at least one rotational position about the axis.Type: ApplicationFiled: May 29, 2008Publication date: July 29, 2010Inventors: Joshua Monroe Cobb, Paul G. Dewa, Justin Kreuzer
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Patent number: 7706420Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.Type: GrantFiled: November 29, 2006Date of Patent: April 27, 2010Assignee: Corning IncorporatedInventors: Joshua Monroe Cobb, Paul G Dewa
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Patent number: 7620080Abstract: A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.Type: GrantFiled: August 23, 2007Date of Patent: November 17, 2009Assignee: Corning IncorporatedInventors: Joshua Monroe Cobb, Paul G Dewa
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Publication number: 20090052480Abstract: A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.Type: ApplicationFiled: August 23, 2007Publication date: February 26, 2009Inventors: Joshua Monroe Cobb, Paul G. Dewa
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Publication number: 20080055579Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.Type: ApplicationFiled: November 29, 2006Publication date: March 6, 2008Inventors: Joshua Monroe Cobb, Paul G. Dewa
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Patent number: 7256221Abstract: Disclosed are photo or electron beam polymerizable compositions, and preparation thereof and devices containing them. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 157 nm lithographic tools.Type: GrantFiled: November 7, 2003Date of Patent: August 14, 2007Assignee: Corning IncorporatedInventors: Kelsee L. Coykendall, Paul G. Dewa, Robert Sabia, David C. Sauer, Paul J. Shustack, Kamal K. Soni
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Patent number: 7232595Abstract: Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.Type: GrantFiled: December 1, 2004Date of Patent: June 19, 2007Assignee: Corning IncorporatedInventors: Kelsee L. Coykendall, Paul G. Dewa, Robert Sabia, David Sauer, Paul J. Shustack, Kamal K. Soni
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Publication number: 20040092618Abstract: Disclosed are photo or electron beam polymerizable compositions, and preparation thereof and devices containing them. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 157 nm lithographic tools.Type: ApplicationFiled: November 7, 2003Publication date: May 13, 2004Inventors: Kelsee L. Coykendall, Paul G. Dewa, Robert Sabia, David C. Sauer, Paul J. Shustack, Kamal K. Soni
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Patent number: 6456384Abstract: A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.Type: GrantFiled: November 9, 2000Date of Patent: September 24, 2002Assignee: Tropel CorporationInventors: Andrew W. Kulawiec, Dag Lindquist, James E. Platten, Paul G. Dewa
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Patent number: 5923425Abstract: A grazing incidence interferometer includes an extended light source for limiting spatial coherence of reference and test beams. A test plate is oriented at a grazing incidence to the test beam so that a first portion of the test beam is reflected from the front surface of the test plate, a second portion of the test beam is reflected from the back surface of the test plate, and the two test beam portions are sheared with respect to each other. The spatial coherence of the test beam is related to the lateral shear between the first and second test beam portions to significantly reduce contrast of an interference fringe pattern between the front and back surfaces of the test plate.Type: GrantFiled: November 20, 1997Date of Patent: July 13, 1999Assignee: Tropel CorporationInventors: Paul G. Dewa, Andrew W. Kulawiec
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Patent number: 5757470Abstract: The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.Type: GrantFiled: August 17, 1995Date of Patent: May 26, 1998Assignee: General Signal CorporationInventors: Paul G. Dewa, Paul F. Michaloski, Paul J. Tompkins, William N. Partlo