Abstract: Systems, methods and apparatus related to pre-wetting an edge portion of a bonded wafer prior to wetting a flat, horizontal portion of the bonded wafer. The apparatus includes a frame having nozzles directed such that couplant discharged from these nozzles wet the edge of the wafer. The edge nozzles have couplant flow vectors that interface to dampen the trajectory of fluid to reduce splash and pre-wet the edges of the bonded wafer.

Abstract: A coupler and a chuck are described. The chuck is configured to secure an article while the wafer is undergoing an inspection process. The chuck has a plurality of vacuum areas. Some vacuum areas hold the wafer in place while other vacuum areas suction couplant from the edge surface of the wafer. The coupler is used to inspect a surface and subsurface of the wafer for defects and includes a sensing device, which may be a transducer. One or more couplant inlet couplings are disposed on a second portion of the coupler, the couplant inlet couplings provide a couplant to a portion of the wafer inspected by the sensing device. A plurality of vacuum inlet couplings is disposed on a third portion of the coupler. At least one of the vacuum inlet couplings provide suction through a recessed portion of a lower surface of the coupler to remove couplant that is outside the portion of the wafer that is being inspected by the sensing device.

Abstract: An adjustable fixture for holding a sample for inspection with a scanning acoustic microscope includes a first horizontal bar disposed on a first end of a frame, and a second horizontal bar disposed on a second end of the frame. The second horizontal bar may be engaged with the frame to be movable between the first end and the second end of the frame. The adjustable fixture may further include a side bar disposed on one or more of the first side and the second side of the frame, with an end of the second horizontal bar slidable and lockable along the side bar, and an engagement mechanism releasably coupling the end of the second horizontal bar to the side bar.

Abstract: An adjustable fixture for holding a sample for inspection with a scanning acoustic microscope includes a first horizontal bar disposed on a first end of a frame, and a second horizontal bar disposed on a second end of the frame. The second horizontal bar may be engaged with the frame to be movable between the first end and the second end of the frame. The adjustable fixture may further include a side bar disposed on one or more of the first side and the second side of the frame, with an end of the second horizontal bar slidable and lockable along the side bar, and an engagement mechanism releasably coupling the end of the second horizontal bar to the side bar.

Abstract: A method and apparatus for ultrasonic inspection of one or more parts, in which one or more parts to be inspected are transferred from a parts carrier to a scan nest that is located in the scanning station. The parts are restrained in the scan nest and then scanned. A pick and place mechanism is used to transfer the parts to be inspected between the parts carrier the scan nest. The inspection path may be altered if a missing part is detected. In one embodiment, a first gas flow port located on the pick and place mechanism or on the transducer holder is used to blow ultrasonic coupling fluid from the front surface of the parts in the scan nest after they have been scanned. In a further embodiment, two or more scan nests are used for parallel operation.

Abstract: A method and apparatus for ultrasonic inspection of one or more parts, in which one or more parts to be inspected are transferred from a parts carrier to a scan nest that is located in the scanning station. The parts are restrained in the scan nest and then scanned. A pick and place mechanism is used to transfer the parts to be inspected between the parts carrier the scan nest. The inspection path may be altered if a missing part is detected. In one embodiment, a first gas flow port located on the pick and place mechanism or on the transducer holder is used to blow ultrasonic coupling fluid from the front surface of the parts in the scan nest after they have been scanned. In a further embodiment, two or more scan nests are used for parallel operation.