Abstract: A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

Abstract: Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate. The spacers are configured to space the cover and the baseplate apart from one another such that sealing surfaces of the cover and the baseplate are separated by a gap. The depressions can be gripper pockets of the baseplate. Multiple spacers can be used in a reticle pod to provide the gap between sealing surfaces. The spacers can be installed to prepare a reticle pod for shipment.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter information and process fluid information. The filter information can be stored on an electronically readable tag on the filter.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump.

Abstract: Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The switching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, this disclosure relates to controlling the operation of a pump using filter information. A removable filter can include an electronically readable tag storing filter information. The filter information can be read by a tag reader and rules applied to the filter information to determine whether or how to operate a pump.

Abstract: The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter information and process fluid information. The filter information can be stored on an electronically readable tag on the filter.