Patents by Inventor Paul R. Marsden

Paul R. Marsden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6394743
    Abstract: A cart for the changeout of modules such as a laser chamber module. In one example, the cart includes at least two platforms that are movable with respect to a frame of the cart and that are coupled together such that an upward force for a vertical movement with respect to the frame of one platform provides a vertical movement with respect to the frame of a second platform at an elevated position. The platforms are coupled to each other with chains, wire, or linkage structures. With some carts, the platforms are removable from the rest of the frame. Also with some carts, an upper platform is collapsible on a lower platform. Some carts include two wheel bases that are foldable with respect to one another so as to allow the cart to traverse a surface obstacle by folding one wheel base down over the surface obstacle and transferring a load to that wheel base from another wheel base located on the opposite side of the surface obstacle.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: May 28, 2002
    Assignee: Cymer, Inc.
    Inventors: Paul R. Marsden, David R. Williams
  • Patent number: 6212211
    Abstract: A laser chamber with a circuitous gas return path dissipates shock waves. In one embodiment, the laser chamber includes a heat exchanger with a large surface area that defines an aerodynamic passage through which gas circulates in the laser chamber. The passage through which the gas circulates directs shock waves away from the discharge region so that the shock waves may dissipate elsewhere in the laser chamber. In addition, the large surface area of the heat exchanger efficiently cools the thermally energetic gas within the laser chamber. In another embodiment, ancillary chambers that are fluidically coupled to the main laser chamber are provided to permit shock waves to be directed away from the discharge area and to be dissipated within the ancillary chambers. Openings to the ancillary chambers are positioned such that shock waves generated by the electrode structure of the laser chamber may propagate directly into the ancillary chamber, where the shock waves then dissipate.
    Type: Grant
    Filed: October 9, 1998
    Date of Patent: April 3, 2001
    Assignee: Cymer, Inc.
    Inventors: James H. Azzola, Paul R. Marsden, Richard C. Ujazdowski
  • Patent number: 4497356
    Abstract: An upright member for supporting partitioning panels having means for retaining a panel, and means for pivotally connecting the member to and adjacent member.
    Type: Grant
    Filed: May 21, 1982
    Date of Patent: February 5, 1985
    Assignee: Intercraft Designs Limited
    Inventors: Terry C. Luck, Paul R. Marsden