Patents by Inventor Paulo Eduardo Lima

Paulo Eduardo Lima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma sources
    Patent number: 8400063
    Abstract: This invention relates to a plasma source in the form of plasma generator (13) which utilizes an antenna (11) and an RF source (12). The generated plasma flows into a chamber (14) and ions are accelerated out of the chamber (14) by grid (15). A body 16 is located in the volume for creating local losses and thereby reducing local plasma density.
    Type: Grant
    Filed: July 6, 2007
    Date of Patent: March 19, 2013
    Assignee: Aviza Technology Limited
    Inventors: Gary Proudfoot, Christopher David George, Paulo Eduardo Lima
  • PLASMA SOURCES
    Publication number: 20100108905
    Abstract: This invention relates to a plasma source in the form of plasma generator (13) which utilises an antenna (11) and an RF source (12). The generated plasma flows into a chamber (14) and ions are accelerated out of the chamber (14) by grid (15). A body 16 is located in the volume for creating local losses and thereby reducing local plasma density.
    Type: Application
    Filed: July 6, 2007
    Publication date: May 6, 2010
    Applicant: AVIZA TECHNOLOGY LIMITED
    Inventors: Gary Proudfoot, Christopher David George, Paulo Eduardo Lima