Patents by Inventor Pavel Slyusarev

Pavel Slyusarev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermally compensated fiber interferometer assembly
    Patent number: 10989879
    Abstract: An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: April 27, 2021
    Assignee: Nikon Metrology NV
    Inventors: Anthony R. Slotwinski, Mina A. Rezk, Pavel Slyusarev
  • THERMALLY COMPENSATED FIBER INTERFEROMETER ASSEMBLY
    Publication number: 20170115455
    Abstract: An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.
    Type: Application
    Filed: June 2, 2015
    Publication date: April 27, 2017
    Applicant: Nikon Metrology NV
    Inventors: Anthony R. Slotwinski, Mina A. Rezk, Pavel Slyusarev