Abstract: An interferometric measuring method and device for measuring the shape of, or the distance to, surfaces are provided, in which light is generated, modulated with respect to its frequency, conducted to both an object surface and a reference surface, brought to interference, and conducted to a photodetector, and, to detect the particular distance, a phase of the photodetector signal is evaluated. A simple, rugged configuration, with the capability of taking a high-resolution measurements in the context of a large unambiguity range, is achieved in that the phase is considered in at least two different instants with the wavelengths that correspond on the basis of the frequency modulation, and the results are fed to the evaluation.

Abstract: An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and having a first beam splitter for splitting the radiation supplied into first and second beam components guided respectively via first and second arms, of which the one is shifted as to the other with a modulating device in its light phase or light frequency, and passes through a delay line, and which are subsequently combined at an additional beam splitter of the modulating interferometer, having a measuring probe that is spatially separated from the modulating interferometer and is coupled/couple-able to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and in which the measuring beam reflected at the surface and the reference beam reflected at a reference

Abstract: The present invention relates to a interferometric measuring device for measuring the shape especially of rough surfaces of a measured object (O), having a radiation-producing unit (SLD) emitting short-coherent radiation, a beam splitter (ST1) for forming a first and a second beam component (T1, T2), of which the first is directed via an object light path to the measured object (O), and the second is directed via a reference light path to a reflecting reference plane (RSP), having a superposition element at which the radiation coming from the measured object (O) and the reference plane (RSP) are brought to superposition, and an image converter (BS), which receives the superposed radiation and sends corresponding signals to a device for evaluation, for the measurement to be taken, the optical path length of the object light path being changed relative to the optical path length of the reference light path.

Abstract: An interferometric measuring method and device for measuring the shape of, or the distance to, surfaces are provided, in which light is generated, modulated with respect to its frequency, conducted to both an object surface and a reference surface, brought to interference, and conducted to a photodetector, and, to detect the particular distance, a phase of the photodetector signal is evaluated. A simple, rugged configuration, with the capability of taking a high-resolution measurements in the context of a large unambiguity range, is achieved in that the phase is considered in at least two different instants with the wavelengths that correspond on the basis of the frequency modulation, and the results are fed to the evaluation.

Abstract: An interferometric measuring device for measuring surface characteristics, shapes, distances, and distance variations, e.g., vibrations, in particular in narrow, hollow spaces, of measuring objects, having a probe part and an optical fiber. Surface dimensions are able to be measured, even in very fine bore holes, in that, in a measuring head, at the free end of the probe part approaching the measuring object, the optical fiber projects out and is itself designed as a measuring fiber for illuminating a point of measurement and for picking up measuring light coming from this measuring point.

Abstract: An interferometric measuring device for detecting the shape of rough surfaces includes a spatially coherent beam gun unit that emits a short time coherent and broad-band beam. The device is separated into a section containing the components of a modulation interferometer and the components of a measuring probe. The measuring probe is coupled to the modulation interferometer via an optical fiber arrangement, and used remotely from the modulation interferometer.

Abstract: An interferometric measuring device for measuring surface characteristics, shapes, distances, and changes in distance, for example vibrations, of measurement objects (7) has a probe section (6). An advantageous design with respect to ease of use and error-free scanning is provided by the fact that the probe section (6) is subdivided into a fixed probe section (6.1) and a rotatable probe section (6.2) mechanically and optically coupled thereto, and that a beam splitter (6.3; 6.3′) is situated in the rotatable probe section (6.2) for creating a reference beam and a measuring beam for the interferometric measurement (FIG. 1).

Abstract: An interferometric measuring device for detecting the shape, roughness or distance of surfaces is described. The interferometric measuring device has a modulation interferometer in which two partial beams are formed, one of which is shifted in its light phase or light frequency with respect to the other by a modulation device. The surface is measured with a measuring probe which is connected to the modulation interferometer and in which a measuring beam and a reference beam are formed, and an interference pattern which is analyzed in a connected receiving unit is formed from the measuring beam and the reference beam.

Abstract: A device for inspecting surfaces includes a beam splitter which couples out, from an input radiation a first measuring radiation and a second measuring radiation. Both measuring radiations exhibit different properties. A first exemplary embodiment makes provision for the different property to be achieved by different polarization planes. Another exemplary embodiment makes provision for the different properties to be achieved by different wavelengths. The measuring radiations reflected by the surfaces are brought together by the beam splitter to form an output radiation which is fed to an optical receiving device. The device according to the present invention is mainly suited for inspecting surfaces in bores, especially, in blind-end bores.

Abstract: An interferometric measuring device for measuring surface characteristics, shapes, distances, and distance variations, e.g., vibrations, in particular in narrow, hollow spaces, of measuring objects, having a probe part and an optical fiber. Surface dimensions are able to be measured, even in very fine bore holes, in that, in a measuring head, at the free end of the probe part approaching the measuring object, the optical fiber projects out and is itself designed as a measuring fiber for illuminating a point of measurement and for picking up measuring light coming from this measuring point.

Abstract: An interferometric instrument that includes a radiation generating unit for emitting briefly coherent radiation is used for sensing the surfaces of a test object by determining an interference maximum. Precise determination of the interference maximum, and therefore precise sensing of the test object, are achieved by providing, in the optical path of the first beam component and/or in the optical path of the second beam component, an arrangement which produces a frequency shift between the two interfering beam components and by providing a beam splitting arrangement, located in front of the photodetector arrangement in the optical path of the interfered radiation upstream from the photodetector device, which can be used to split the beams into at least two spectral components and supply them to the photodetector arrangement either directly or via additional elements on the photodetectors assigned to the components.

Abstract: An interferometric measuring device for measuring shapes of rough surfaces of an object to be measured. The measuring device has a radiation generator that emits a short-coherent radiation; a beam splitter for forming a reference beam that is directed toward a device having a reflecting element for periodically changing the light path, and a measuring beam which is directed toward the object to be measured; a superposition element at which the measuring beam coming from the object to be measured and the reference beam coming from the device are made to interfere; and a photodetector that receives the interfered radiation. In a simple design, a high measuring accuracy is achieved in that the device for changing the light path has a parallelly-displacing arrangement arranged in the beam path, and, fixedly arranged behind it, the reflecting element, and that a compensating grating is arranged in the beam path of the reference beam upstream of the parallelly-displacing arrangement.

Abstract: An interferometric instrument for sensing the surfaces of a test object includes a radiation generating unit for emitting briefly coherent radiation and a first beam splitter for producing a first and second beam component. One beam component is aimed at the surface to be sensed and the other beam component is aimed at a device with a reflective element for periodically changing the light path. The instrument also has an interference element which causes the radiation coming from the surface and the radiation coming from the reflecting device to interfere with one another and a photodetector which receives the radiation. A simple design is used to achieve a highly accurate measurement by providing an arrangement which produces a frequency shift between the two interfering beam components in the optical path of the first beam component and/or in the optical path of the second beam component.

Abstract: An interferometric instrument for sensing the surfaces of a test object includes a radiation generating unit for emitting briefly coherent radiation and a first beam splitter for producing a first beam component and a second beam component. One beam component is aimed at the surface of the test object, and the other beam component is aimed at a device with a reflecting element for periodically changing the light path. The instrument also has an interference element which causes the radiation coming from the surface and the radiation coming from the device to interfere with one another, and a photodetector which receives the radiation. With a simple design, it is possible to increase the measuring accuracy by providing the device for changing the light path with an arrangement producing a parallel shift positioned in the optical path, followed by a stationary reflecting element.

Abstract: Described is a method of interferometric measurement of positions and position changes, as well as physical quantities derived therefrom, of a part to be tested using heterodyne interferometry, with a laser being modulated to change the frequency of the radiation emitted by it using a time-variable pulsating injection current in order to generate the heterodyne frequency, and one portion of the emitted radiation is routed via an optical bypass, while the other portion is routed without the optical bypass to the part and, from there, to a measuring receiver. Improved evaluation of the measurement results is achieved with smaller dimensions due to the fact that the signal shape of the injection current has a rising edge that is steep compared to its pulse length and a subsequent plateau.

Abstract: An interferometric measuring arrangement for the testing of surfaces with at least two synthetic holograms, wherein from an incident radiation at least two partial beams are formed of which the one, after diffraction in the first hologram, is reflected at the surface to be tested and is directed at a point of the second hologram upon which the second partial beam impinges directly so that an interference pattern that is characteristic of the surface is formed. With a simple design, it is also possible to test a surface in a blind bore in that the first hologram is configured as a reflection hologram and in that the other partial beam is a beam that is reflected at the reflection hologram with a zero-order diffraction.

Abstract: An interferometric measuring device measures rough surface profiles on a test object. The measurement is performed using radiation that is coherent over a short distance, a reference beam being periodically modulated in its path of light, i.e., in its propagation time, and being made to interfere with a measuring beam reflected off of the surface of the test object, and the interfered radiation being evaluated with respect to the maximum of the interference contrast. With a simple design, a high measuring accuracy is achieved in that the measuring device has a modulation-interferometer arrangement MI, in which the path of light is altered using acoustooptical deflectors. A compensation device is provided for correcting the spatial decoherence and dispersion. In a downstream demodulation-interferometer arrangement, the measuring beam is interfered by the reference beam and fed to a photodetector.

Abstract: An interferometric instrument for scanning the surfaces of a test object by measuring the interference maximum contains a radiation generating unit that emits briefly coherent radiation. It is possible to perform precise measurements relatively easily even at difficult-to-access points on the test object by splitting the first beam into at least two additional beams using at least one additional beam splitter. One additional beam, referred to as a reference beam, is supplied to a reference mirror positioned at a specific distance from the additional beam splitter. Another additional beam, referred to as a measuring beam, is deflected to a specific measuring point on the test object. The interference maxima of the reference beam and the measuring beam can be detected separately by the photodetector arrangement and the control system.

Abstract: A laser diode (1) of a laser vibrometer emits light which is guided onto a polarization beam splitter (3) by a lens 2. A portion of the beam is guided through directly to an imaging lens (4) and a second portion is deflected onto a mirror (5). Quarter-wave plates (6) and (7) are arranged between the polarization beam splitter and respectively the lens or the mirror. The beam which is reflected on the mirror is guided completely through the polarization beam splitter onto a photodetector unit (8). The beam reflected by the object (9) to be measured, which swings in the direction (14), is also deflected to the photodetector unit. The output signal of the photodetector unit, the interference signal generated from the superposition of the two reflected beams, is supplied to an electronic evaluation equipment (10). The latter is also supplied with a signal of a current modulator (11) which, on the other hand, supplies the laser diode with modulated injection current via line (12).

Abstract: An optical sensor for rotational movements is proposed that includes a semiconductor laser that is at least intermittently activated, and whose frequency-modulated beam is split into two partial beams that respectively pass through an annular optical fiber arrangement in opposite directions, are subsequently superposed as coupled-out signals and conducted to a photodetector that emits an output signal that has a predeterminable heterodyne frequency, and whose phase position permits the determination of the rate of rotation of the arrangement with respect to a reference signal. The sensor of the invention can be installed into integrated optics, wherein all of the optical beams can be guided in optical fibers. The sensor of the invention is particularly suited as an optical fiber gyro or a rotation rate sensor.