Abstract: Various embodiments may provide a method of forming an energy conversion device. The method may include forming an electrolyte layer on the first surface of the semiconductor substrate. The method may also include forming a cavity on the second surface of the semiconductor substrate using a deep reactive ion etch. The method may further include enlarging said cavity by carrying out one or more wet etches so that the enlarged cavity is at least partially defined by a vertical arrangement comprising a first lateral cavity surface of the semiconductor substrate extending substantially along a first direction, and a second lateral cavity surface of the semiconductor substrate adjoining the first lateral cavity surface. The method may include forming a first electrode on a first surface of the electrolyte layer, and forming a second electrode on a second surface of the electrolyte layer.

Abstract: Various embodiments may provide a method of forming an energy conversion device. The method may include forming an electrolyte layer on the first surface of the semiconductor substrate. The method may also include forming a cavity on the second surface of the semiconductor substrate using a deep reactive ion etch. The method may further include enlarging said cavity by carrying out one or more wet etches so that the enlarged cavity is at least partially defined by a vertical arrangement comprising a first lateral cavity surface of the semiconductor substrate extending substantially along a first direction, and a second lateral cavity surface of the semiconductor substrate adjoining the first lateral cavity surface. The method may include forming a first electrode on a first surface of the electrolyte layer, and forming a second electrode on a second surface of the electrolyte layer.

Abstract: A silicon-based solid oxide fuel cell (SOFC) with high surface area density in a limited volume is provided. The structure consists of a corrugated nano-thin film electrolyte and a silicon supportive layer on a two-stage silicon wafer through-hole to maximize the electrochemically active surface area within a given volume. The silicon supportive layer is done by boron-etch stop technique with diffusion doping. The fabrication of two-stage wafer through hole combines deep reactive ionic etching (DRIE) and KOH wet etching of silicon for a wafer through hole containing two difference sizes. By these design and fabrication methods, the absolute electrochemically active area can be as high as five times of that of the projected area.

Abstract: An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.

Abstract: A membrane-electrode assembly for a solid oxide fuel cell is provided. The membrane-electrode assembly has a substantially constant-thickness electrolyte layer. The electrolyte layer distinguishes first and second electrolyte layer surfaces arranged in a three-dimensional pattern with opposite first and second planar pattern surfaces. The three-dimensional pattern has a first set of features extending inward from the first planar pattern surface. It has a second set of features extending inward from the second planar pattern surface opposite to the first planar pattern surface. A first electrode layer is adjacent and conforming to the first electrolyte layer surface. At least one mechanical support structure exists within some or all of the second set of features. A second electrode layer is adjacent and conforming to the second electrolyte layer surface and to at least one mechanical support structure. The membrane-electrode assembly is deposited on a substrate with at least one through hole.

Abstract: An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.

Abstract: An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.

Abstract: An improved two-step replication process for fabrication of porous metallic membranes is provided. A negative of a porous non-metallic template is made by infiltration of a liquid precursor into the template, curing the precursor to form a solid negative, and removing the template to expose the negative. Metal is deposited to surround the exposed negative. Removal of the negative provides a porous metallic membrane having pores which replicate the pores of the original template membrane. The negative is kept immersed in a liquid at all times between removing the template and depositing the metal. This immersion eliminates damage to the negative that would be incurred in drying the negative out between these processing steps. Another aspect of the invention is metallic membranes prepared according to the preceding method. For example, metallic membranes having pores smaller on one side than on the other side of the membrane are provided.