Patents by Inventor Peijin XING

Peijin XING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical vapor deposition apparatus and its cleaning method
    Patent number: 10240231
    Abstract: A chemical vapor deposition apparatus includes: a reaction chamber, a reaction area in the upper portion of the reaction chamber, an exhaust area in the bottom portion of the reaction chamber and a pumping apparatus connected to the outside of the reaction chamber. The exhaust area includes an isolating device dividing the exhaust area into an exhaust chamber and a storage chamber. The isolating device has a sidewall with gas openings connecting the exhaust chamber and the storage chamber. The exhaust area further includes a scraping component that can move up and down between the upper end and the lower end of the gas openings.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: March 26, 2019
    Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
    Inventors: Zhiyou Du, Peijin Xing, Wenyuan Fan, Yinxin Jiang
  • CHEMICAL VAPOR DEPOSITION APPARATUS AND ITS CLEANING METHOD
    Publication number: 20160319425
    Abstract: A chemical vapor deposition apparatus includes: a reaction chamber, a reaction area in the upper portion of the reaction chamber, an exhaust area in the bottom portion of the reaction chamber and a pumping apparatus connected to the outside of the reaction chamber. The exhaust area includes an isolating device dividing the exhaust area into an exhaust chamber and a storage chamber. The isolating device has a sidewall with gas openings connecting the exhaust chamber and the storage chamber. The exhaust area further includes a scraping component that can move up and down between the upper end and the lower end of the gas openings.
    Type: Application
    Filed: April 26, 2016
    Publication date: November 3, 2016
    Inventors: Zhiyou DU, Peijin XING, Wenyuan FAN, Yinxin JIANG