Abstract: This invention concerns a calibration method and compatible sensor construction for the determination of relative concentration of a gas or vapor. According to the method a sensor is brought to controlled conditions, in which at least one calibration point is determined, and then with the help of the calibration point measurement values the response of the sensor for the measured gas or vapor is computed. According to the invention, both the temperature of the sensor and the relative concentration of the desired gas or vapor is measured at the actual measurement site, and the temperature of the sensor is deviated from the ambient temperature so transiently that the partial pressure of the measured gas or vapor can be assumed to stay at least approximately constant at the measurement site, whereby the results of measurements performed at each deviated temperature level can be used for computing a correction factor for the calibration of the sensor.

Abstract: This invention concerns a method for trimming a planar capacitor. According to the method, a laser emission is focused to an electrode of a capacitor formed on a substrate transparent to laser emission and including of an upper electrode, an insulation layer, and a lower electrode, in order to achieve a passivation effect on the electrode. The laser emission is focused according to the invention locally onto the lower electrode through the substrate in order to achieve a heating effect on the lower electrode, thereby oxidizing the electrode material so that the lower electrode is locally converted into an electrically nonconductive state while being protected by the substrate and the insulation layer. The trimming method in accordance with the invention is accurate and offers a stable capacitance value.