Patents by Inventor PETER BYUNGHOON HAN

PETER BYUNGHOON HAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA SYSTEM AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20180182600
    Abstract: A plasma system includes an electrode and an RF power supply unit supplying an RF power to the electrode to generate a plasma on the electrode. The RF power is provided in a pulse having a valley-shaped portion during an on-pulsing interval of the pulse. The valley-shaped portion is defined by a valley angle and a valley width. By controlling the valley angle and the valley width, the plasma may control the etching of a substrate.
    Type: Application
    Filed: November 29, 2017
    Publication date: June 28, 2018
    Inventors: MinKyu SOHN, DOUGYONG SUNG, SeungBo SHIM, JaeWon JEONG, PETER BYUNGHOON HAN