Abstract: Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Abstract: Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Abstract: Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Abstract: In a method of detecting blemishes in the phosphor screen on the inside surface of a kinescope faceplate while simultaneously avoiding detecting deposits on the outside surface of the faceplate as blemishes, the faceplate is arranged between a light source and a light detector in an orientation wherein light from the light source passes through the faceplate and subsequently through the phosphor screen prior to reaching the detector.

Abstract: A portable television camera comprises a relatively small housing including a solid-state imager for generating image-representative signals, and signal processing circuitry coupled to the imager for generating a video signal from the image representative signals. The noise performance of the solid-state imager is degraded by a temperature rise within the small housing caused by the heat generated from the signal processing circuitry. A thermal isolation is used for dividing the housing into a first part including the solid-state imager and a second part, isolated from the first part, which is associated with the heat generating signal processing circuits.

Abstract: A system is provided for determining the widths and spacings of substantially parallel opaque stripes on a substrate, wherein the stripes are separated by openings. The system comprises a light source for illuminating the substrate and photodetecting means positioned to receive light from the illuminated substrate. Means are included for scanning the photodetecting means transverse to the stripes and for sweeping the photodetecting means in a direction substantially parallel to the stripes. The system further includes means for converting the output of the photodetecting means into a quantized signal, means for dividing the quantized signal into separate signals representing stripe widths and opening widths between stripes, and means for converting the stripe width and opening width signals into a signal representing center-to-center spacing between openings.

Abstract: A flaw detection system optically detects defects on the surface of a grooved video disc surface. A beam of light incident on the surface being inspected is reflected thereby into a series of diffraction order cones. A cylindrical lens converges the higher diffraction order cones onto a split photodetector. When the light beam which scans the disc surface passes over a surface defect, such as a hillock, the reflected beam is deflected first to one photosensitive surface of the split photodetector and then to the other, thus providing an output from the photodetector to indicate the presence of such a defect.

Abstract: The inspection system detects defects in regular patterns wherein the elements of the patterns may have variations in period. In the system a camera, having a photoelectric sensor therein, is mechanically moved to permit the sensor to scan and detect the elements of a pattern. The system includes circuitry for processing the output of the sensor. The circuitry includes portions for quantizing the sensor output signal, for storing the quantized signal of a portion of a scan, for determining element period from the quanitized signal and for controlling the output of the storage portion at times related to element period. The circuitry also includes portions for correlating the output from the storing portion with a real time quantized signal of the same scan and for indicating the presence of an error related to a pattern defect in response to a miscorrelation signal from the correlating portion.

Abstract: The inspection system detects defects in regular patterns wherein the elements of the patterns may have variations in period. The system includes means for scanning and detecting the elements of a pattern to produce an original output signal indicative of the pattern. Means then delay the output signal from the scanning and detecting means to produce a delayed output signal. Next, any deviation in period between the original output signal and the delayed output signal is detected by suitable means. Means now match the periods of the original and delayed output signals, and other means correlate the matched original and delayed output signals.

Abstract: System for the analysis of an optically sensed field, useful, for example, for detecting defects in an object such as a shadow mask of a color kinescope, which permits relatively rapid examination of the article or surface being scanned. An important feature of the system is a detector linear array disposed a selected distance from the image plane of the spatial field permits higher speed sequential convolution of the spatial field at each of a plurality of overlapping segments of given length, situated at uniformly-spaced intervals along a field dimension, with a given type of limited spatial extent kernel function of said given length.

Abstract: The spatial field is sequentially convolved at each of a plurality of uniformly-spaced intervals along a field dimension with a given type of limited spatial extent kernel function which preferably has a one-octave spatial bandwidth. Convolution combining means derives an output only if the q'th power of the sequential convolutions exceed a threshold corresponding to the just-noticeable presence of spatial frequencies within the spatial bandwidth of the kernel function.