Abstract: A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.

Abstract: A seal (40) for sealing an interface between a container and a lid of a process chamber. The seal (40) comprises a metallic or polymeric sealing element (50) and an elastomeric sealing element (60) that are arranged to seal the interface in series, with the metallic or polymeric sealing element (50) being situated to encounter processing activity upstream of the elastomeric sealing element (60).

Abstract: A process chamber 10 comprising a container (12), a lid (14), and a sealed interface (16) therebetween. The container's interface surface (30) and/or the lid's interface surface (32) includes at least one groove (36) in which a seal (40) is situated. The seal (40) comprises an elastomeric element (50) and a metallic element (60). The elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface (16) sequentially during its conversion to a sealed condition. And/or the elastomeric element (50) and the metallic element (60) can be arranged and adapted to seal the chamber's interface in series once the lid (14) is in its sealed condition.

Abstract: It is disclosed a seal assembly (5) which comprises a layered structure. It consists of a first layer (9, 12) of a base material, a second layer (10) of thermal insulating material on top of the base material and a third layer (11, 12) of base material or an oxide resistant material on top of the second layer (10) of thermal insulation. The inventive seal assembly (5) described herein can be arranged between combustor liner segments (2).

Abstract: A metallic seal includes a cold formed substrate layer and one or more additional layers. At least one of the layers offers improved resistance to high temperature stress relaxation.

Abstract: A seal has a metallic body having a convoluted cross-section extending between first and second ends and a first generally interior surface extending between the first and second ends and a second generally exterior surface extending between the first and second ends. An adhesive is located in one or more locations on at least one of the surfaces, the adhesive holding the body in a longitudinally contracted condition. There are related methods of manufacture. In related methods of use, the adhesive is caused to release, allowing the seal to expand toward the relaxed condition.

Abstract: A seal has a metallic body having a convoluted cross-section extending between first and second ends and a first generally interior surface extending between the first and second ends and a second generally exterior surface extending between the first and second ends. An adhesive is located in one or more locations on at least one of the surfaces, the adhesive holding the body in a longitudinally contracted condition. There are related methods of manufacture. In related methods of use, the adhesive is caused to release, allowing the seal to expand toward the relaxed condition.