Abstract: Ions for neutralizing electrostatic charge on an object are generated and delivered in a stream of gas flowing through a dielectric channel that surrounds a loop of conductive filament which forms an ionizing electrode. The loop is formed within a single plane, or within multiple planes, and is supported within the channel with a plane of the loop substantially aligned with flow of gas through the channel. A region of minimum field intensity within the bounded region of the loop electrode is oriented in alignment with substantially maximum velocity of gas flow through a cross section of the dielectric channel.

Abstract: Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by using a second voltage. The second voltage creates an electrical field, which is preferably located in the vicinity of the ion cloud. The redistribution of the ions increases the effective range in which available ions may be displaced or directed towards the charged object. The electrical field redistributes ions that form the ion cloud. Ion redistribution within the ion cloud occurs because ions having a polarity corresponding to the polarity of the second voltage are repelled from the electrical field, and ions having a polarity opposite from that of the electrical field are attracted to electrical field.

Abstract: A high voltage power supply for a static neutralizer is disclosed. The high voltage power supply includes a resonant converter and a load with an emitter module having an emitter, reference electrode, and a capacitance value. The resonant converter is disposed to have a resonant frequency and an output coupled to the load. The resonant converter generates an output waveform with an amplitude sufficient for generating to ions by corona discharge when the load receives the output waveform. The load is predominantly capacitive when the resonant converter is operating at the resonant frequency.

Abstract: A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s).

Abstract: An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.

Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.

Abstract: An apparatus and method for monitoring the output of an ionizing blower. A measuring chamber captures a portion of the air ion stream, and measures balance plus air ion current. Since the measurement chamber is isolated from extraneous electrostatic fields, measurements contain less analytical noise. Air flow through the measurement chamber is created by the inherent pressure difference between the high pressure and low pressure sides of an air mover. Two electrodes inside the measurement chamber are combined with a power supply, a low current amplifier, and a controller. The controller also makes adjustments to the ionizing blower.

Abstract: A corona discharge static neutralizing device includes a wire electrode retained in tension between spaced ends of a resilient support member that is positioned within a flowing air stream. Another electrode aligned with and spaced from the wire electrode promotes a flowing ion stream, when connected to receive an ionizing difference of potential, that flows in skew orientation relative to the flowing air stream. Multiple wire electrodes are supported in tension on a resilient support member along with another electrode disposed on the support member intermediate the wire electrodes and in substantially the same plane therewith.

Abstract: The present invention pertains to various embodiments for managing ion current balance by independently controlling positive ion current and negative ion current generated during static neutralization. In another embodiment, E-Field compensation may be provided. These embodiments disclose both method and apparatus implementations.

Abstract: An air ion collimator is added to ionizers with integrated fans that are used to remove static charge. Three mechanisms minimize air ion losses through recombination. Hence, the collimator increases the air ions that are available for charge removal. First, reducing turbulence slows air ion mixing. Second, air entrainment into fast moving air ion zones further slows the rate of air ion losses by dilution. The rate of recombination reaction slows with decreasing ion density. Third, vanes within the collimator delay mixing. In addition to conserving air ions, the collimator directs more ions to the target. Air ions lost to grounding are reduced. Again, more air ions are available to remove static charge from the target.

Abstract: A module for generating ions in a flowing air stream includes a support structure having a central region adapted to pass a flowing air stream therethrough, and including a plurality of supports for positioning a filamentary ion-generating electrode in a polygonal configuration within the central region. The supports and filament are relatively moveable to wipe the surface of the filament at each support for removing accumulated contaminants on the filament.

Abstract: At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer effectiveness is enhanced by recovering gas ions that are normally trapped between the nozzles and under a portion of the ionizer from which the nozzles project. Without the orifice properly positioned, the trapped gas ions are lost by recombination or grounding. With the orifice positioned in an area of weak electrostatic forces, more gas ions are available for discharging the charged object. The combined air consumption of nozzles plus at least one orifice is the same or less than nozzles alone would consume for a given discharge time.

Abstract: Static neutralization of a charged object is provided by applying an alternating voltage having a complex waveform, hereinafter referred to as a “multi-frequency voltage”, to an ionizing electrode in an ionizing cell. When the multi-frequency voltage, measured between the ionizing electrode and a reference electrode available from the ionizing cell, equals or exceeds the corona onset voltage threshold of the ionizing cell, the multi-frequency voltage generates a mix of positively and negatively charged ions, sometimes collectively referred to as a “bipolar ion cloud”. The bipolar ion cloud oscillates between the ionizing electrode and the reference electrode. The multi-frequency voltage also redistributes these ions into separate regions according to their negative or positive ion potential when the multi-frequency voltage creates a polarizing electrical field of sufficient strength.

Abstract: An improved ionizer for providing an enhanced ion balance of negative and positive ions is disclosed. The ionizer may include a first ion emitter and a second ion emitter; at least one reference electrode coupled to ground; and a power supply for providing an AC voltage to the first and second ion emitter. This power supply is DC isolated from ground. In addition, the present invention includes a first rectifier coupled in series between the first ion emitter and the power supply, a second rectifier coupled in series between the second ion emitter and the power supply. The first and second rectifiers cause a DC bipolar voltage to be created from the first and second ion emitters during operation of the ionizer.

Abstract: An air ionizing module and method for generating ions of one and opposite polarities within a flowing stream of air or other gas includes a thin-filament electrode mounted within the flowing stream in regions thereof of maximum flow velocity. The thin-filament electrode is mounted in a multi-sided polygonal configuration to receive high ionizing voltage of alternating one and opposite polarities to form an intense stream of ions toward an electrically-isolated reference electrode positioned upstream of the filament electrode. Another reference electrode positioned within the flowing stream downstream of the filament electrode receives a bias voltage of selected polarity to control the quantities of generated ions of positive and negative polarities in an outlet stream of the ions and flowing gas.

Abstract: An apparatus and method for charging substrates without introducing high electric fields into the work environment. A non-contact charging plate is combined with a source of bipolar air (or gas) ions to effect the charging. This method is useful for studying the effects of static charge in charge sensitive processes. Substrates to be charged include semiconductor wafers, media disks, reticles, and flat panel glasses. In many cases, the shape of the apparatus is similar to industry-standard carriers. Hence, charging can be done robotically.

Abstract: Ions for neutralizing electrostatic charge on an object are generated and delivered in a stream of gas flowing through a dielectric channel that surrounds a loop of conductive filament which forms an ionizing electrode. The loop is formed within a single plane, or within multiple planes, and is supported within the channel with a plane of the loop substantially aligned with flow of gas through the channel. A region of minimum field intensity within the bounded region of the loop electrode is oriented in alignment with substantially maximum velocity of gas flow through a cross section of the dielectric channel.

Abstract: An air ion collimator is added to ionizers with integrated fans that are used to remove static charge. Three mechanisms minimize air ion losses through recombination. Hence, the collimator increases the air ions that are available for charge removal. First, reducing turbulence slows air ion mixing. Second, air entrainment into fast moving air ion zones further slows the rate of air ion losses by dilution. The rate of recombination reaction slows with decreasing ion density. Third, vanes within the collimator delay mixing. In addition to conserving air ions, the collimator directs more ions to the target. Air ions lost to grounding are reduced. Again, more air ions are available to remove static charge from the target.

Abstract: Method and apparatus for generating positive and negative ions include electrodes that are spaced apart by a gap and that are supplied alternating ionizing voltage at a frequency which causes the generated ions to move within the gap between electrodes and exhibit a resident time in transit that accumulates the ions substantially within the central region of the gap. An electrostatic field, or a flowing stream of air or other gas passing through the gap, transports the generated ions from within the gap. Self-balancing of generated positive and negative ions is accomplished using capacitive coupling of the ionizing voltage to at least one of the electrodes disposed about the gap.

Abstract: An air ionizing module and method for generating ions of one and opposite polarities within a flowing stream of air or other gas includes a thin-filament electrode mounted within the flowing stream in regions thereof of maximum flow velocity. The thin-filament electrode is mounted in a multi-sided polygonal configuration to receive high ionizing voltage of alternating one and opposite polarities to form an intense stream of ions toward an electrically-isolated reference electrode positioned upstream of the filament electrode. Another reference electrode positioned within the flowing stream downstream of the filament electrode receives a bias voltage of selected polarity to control the quantities of generated ions of positive and negative polarities in an outlet stream of the ions and flowing gas.