Patents by Inventor Peter Gruenwald

Peter Gruenwald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rapid thermal processing (RTP) system with rotating substrate
    Patent number: 5965047
    Abstract: A rapid thermal processing (RTP) chamber, wherein one wall of the chamber supporting a substrate rotates with respect to the rest of the chamber so that the substrate being treated in the RTP chamber is relatively rotated with respect to the lamps heating the substrate.
    Type: Grant
    Filed: October 24, 1997
    Date of Patent: October 12, 1999
    Assignee: Steag AST
    Inventors: Werner Blersch, Peter Gruenwald, Michael Maurer, Helmut Merkle, Thomas Theiler, Heinrich Walk