Patents by Inventor Peter Ivor Tudor Edwards

Peter Ivor Tudor Edwards has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of implanting a substrate and an ion implanter for performing the method
    Patent number: 7282427
    Abstract: An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: October 16, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Bernard Harrison, Peter Ivor Tudor Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks, Takao Sakase, Marvin Farley, Shu Satoh, Geoffrey Ryding
  • Method of implanting a substrate and an ion implanter for performing the method
    Patent number: 7253424
    Abstract: An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: August 7, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Bernard Harrison, Peter Ivor Tudor Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks, Takao Sakase, Marvin Farley, Shu Satoh, Geoffrey Ryding
  • Method of implanting a substrate and an ion implanter for performing the method
    Patent number: 7049210
    Abstract: An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.
    Type: Grant
    Filed: January 12, 2004
    Date of Patent: May 23, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Adrian Murrell, Bernard Harrison, Peter Ivor Tudor Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks, Takao Sakase, Marvin Farley, Shu Satoh, Geoffrey Ryding
  • Method of implanting a substrate and an ion implanter for performing the method
    Publication number: 20040191931
    Abstract: An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.
    Type: Application
    Filed: January 12, 2004
    Publication date: September 30, 2004
    Applicant: APPLIED MATERIALS INC.
    Inventors: Adrian Murrell, Bernard F. Harrison, Peter Ivor Tudor Edwards, Peter Kindersley, Craig Lowrie, Peter Michael Banks, Takao Sakase, Marvin Farley, Shu Satoh, Geoffrey Ryding